Page 1 - Vol.31
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300mm FABS

         FACILITY JOURNAL






                                                                    SEPTEMBER/2018
                                                                    L.31
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                                                                    O



          TSMC / 300mm FD PUBLISHED                             URL.http://nfjournal/
  NEW FAB ENGINEERING


  300mm F ABS F ACILITY JOURNAL




          水氣化系統運轉


          生產力提升與自動化發展實務



          研磨液自動循環系統開發 解決手動操作風險
          Automation Drum Circulation System Development

          平整劑應用於液中求銅系統產能提升
          Applying Leveling Agent in W-CuSO  Plating System for Performance Enhancement

          廢水外排不鈷息：先進製程廢水全鈷回收
          Cobalt Recycle Methodology Study on Waste Water Treatment







                                                                                       70%




                                                       Water                                85%
                                                         Treatment










                                                                                                     100%
                                                                        Gas &
                                                                       Chemical
 Vol.
 Vol.31
 20




  DECEMBER  2015
  SEPTEMBER  2018
                                                                                                          Fabs Facility Division
                                                                               300mm FABS FACILITY JOURNAL          SEPTEMBER  2018  1
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