Page 55 - Vol.04
P. 55

F12P5 LN2 Central Supply System PFD
                           Exhaust                         Vent
                                          LN2 supply line
                                                               LN2 separator


                                                        LN2 supply to tool
                                                                                                                   55
                      Bayonet Joint Assembly





 54









                F12P5 LN2 Central Supply System Layout
                     LN2 cylinder storage area
                     LN2 supply line









                              P4                         P5






 液態注入 / 排放閥  頂部氣體排放閥
 氣體使用閥
 節約閥
 升壓調節閥
 升壓閥



 桶內壓力
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