Page 13 - Vol.05
P. 13
NH3 (ppb) TOC (ug/m^3)
70 1400
1
60 1200
NH3 (ppb)
2 TOC (ug/m^3)
50 1000
40 3 800
F/E tool move-in 11/20
30 600
20 400
10 4 200
5
0 0
1 2 3 4 5 6 7 8 Week 9
e
t
Sep m r e b O o t c e b r
16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24
Vendor Area
1 UIS (PX + partition) 1
1 UIS (PX + partition) 2
1 UIS (PX + partition) 3
1 UIS (PX + partition) 4
1 UIS (PX + partition) 5
1 UIS (PX + partition) 6 11
2 Organo (UPW pipe) 1
2 Organo (UPW pipe) 2 Special
2 Organo (UPW pipe) 3
2 Organo (UPW pipe) 4 Report
2 Organo (UPW pipe) 5
2 Organo (UPW pipe) 6
3 MU (Drain pipe) 1
3 MU (Drain pipe) 2 特別
3 MU (Drain pipe) 3 企劃
3 MU (Drain pipe) 4
3 MU (Drain pipe) 5
3 MU (Drain pipe) 6
4 MIC-G (Gas pipe) 1
4 MIC-G (Gas pipe) 2
4 MIC-G (Gas pipe) 3
4 MIC-G (Gas pipe) 4
4 MIC-G (Gas pipe) 5
4 MIC-G (Gas pipe) 6
5 MIC-C (Chem. pipe) 1
5 MIC-C (Chem. pipe) 2
5 MIC-C (Chem. pipe) 3
5 MIC-C (Chem. pipe) 4
5 MIC-C (Chem. pipe) 5
5 MIC-C (Chem. pipe) 6
6 U+Y (AAS duct) 1
6 U+Y (AAS duct) 2
6 U+Y (AAS duct) 3
6 U+Y (AAS duct) 4
6 U+Y (AAS duct) 5
6 U+Y (AAS duct) 6
Area： 1 2 3 4 5 6
