Page 5 - Vol.48
P. 5
TSMC / FACILITY PUBLISHED
VOL.48
↗⨡
URL.http://nfjournal/
㫲方墡䏠㫩ㄾ圑ょ䏦僅䮹䰯䤧⩘弉帇䩟䋄
:DWHU (OHFWURO\VLV 6\VWHP IRU +\GURJHQ 3URGXFWLRQ DQG 6WDEOH RSHUDWLRQ
0DQDJHPHQW
㗘ɞ䏜朗乀 ⾆ⴂ弣ɞ⑁⎨⼱〉Ắ愹ɞ
㌖堿 $EVWUDFW
㱼㱴䄋㛇❤奎恱ṛ㝔ῐ䕹⊁䛕⥸⯨㱴欥 %XON *DV 熂1 奎䩜ἶṜ(89㪰⑁㝅寤䕹戠䫒⣯ ⼱㽐彚䌑㴒Ṝ熂ᾁ婙㱼㱴㰠⥺
村㲓悥 ⑁㩎弛 熂↙⊞⑁䪞⸶⼱䕹䛕㱼㱴Ẍ姒䖂唉㱴䖃䅈 ⥺䆇㱴 戞㗅㉧䖃懘夓娴㘊⽠䕰䕳熂䕰䕳悟䩜Ṿ㝔恱㉡ờ㱸⍧䤄⋀
䕳䊺㏣剄⥸㱴Ṿ熂偝㲅杌娴䕳㱼㘊⽠⋀䕳䊺№㝚㱸㱴␛㲅熂悜䕹㮵㋑墤⑀悥⊁ᾟ䤄㏣䜿㩪˛㝽㗘暵ỗ㏳婟䜿⊞㱴欥⼱Ẍ㶒奎
㱼㘊㴦㶒䩜⥧熂㝅嫄䶁嫻㙟❹⑁䪞⼱↸⽋便䭽ṑ⦨㱼㱴奎恱䵌䷂ 㲅杌娴熂㝑⥸䕳兎䄋 &0+ 䛕〔幀㯈䩜熂⍖⑼⯚↹婾婙
䭷❜曬㱼㱴⯚↹婾婙㩪㻧 桖 熂㱼㱴 㱸㱴YHQW䯲幀ᾞ便Ằ恠悟㩲㔽㏣㖏䀔弰欥悃墝憞便熂㝑嘚䖂㱴欥⼱䷤檨奘奎⯉
倣 ⇂⯝㉡%.0 桖˚356 桖˚/6/ 桖 ˚㚓姒㲓㱴欥⼱村㝚⺉模₍䐾Ἃ┲ṷⱞ⇇悃墝䝉昭㈚寛㔞ᾭ婤久熂䤋㮵⦨䵌䷂
兎⯚↹ⱟ↶ṥ䕳┒┒崻ỷ兎䭷㩪㻧˛
旃捜婅 唉㳎䖃䅈戞㗅˚䖃懘夓娴˚㲅杌娴
+\GURJHQ LV RQH NLQG RI EXON JDV XVHG LQ VHPLFRQGXFWRU IDEULFDWLRQ SODQW %HORZ 1 QRGH SURFHVV (89 WRROV
LPSRUW ZLOO FDXVH D VXGGHQ LQFUHDVH LQ FRQVXPSWLRQ 'HSHQG RQ ) IDFWRU\ IXOO ORDGLQJ LW LV HVWLPDWHG WKDW WKH GDLO\
GHPDQG IRU K\GURJHQ ZLOO UHDFK + 2 WUDLOHUV 760& IDFWRULHV XVH +\GURJHQ WKDW LV SURGXFHG E\ 6WUHDP 0HWKDQH
5HIRUPHU RU 0H2+ &UDFNHU SURFHVV EXW WKHVH SURGXFWLRQ SURFHVV ZRXOG FDXVH FDUERQ GLR[LGH E\ SURGXFWV WR EH
GLVFKDUJHG LQWR WKH DWPRVSKHUH %\ SURGXFWV RI ZDWHU HOHFWURO\VLV K\GURJHQ SURFHVV DUH RQO\ R[\JHQ DQG ZDWHU DQG
XVLQJ WKLV WHFKQRORJ\ FDQ DFKLHYH WKH JRDO RI ORZ FDUERQ HPLVVLRQ ,Q DGGLWLRQ WR GLVFXVVLQJ WKH K\GURJHQ SURGXFWLRQ
PHWKRGV LQ JDV SODQWV WKLV SDSHU DOVR GHVFULEH LQ GHWDLO WKH PHQWDO MRXUQH\ RI EXLOGLQJ WKH ILUVW K\GURJHQ SURGXFWLRQ
V\VWHP ZDWHU HOHFWURO\VLV ZLWK D PD[LPXP SURGXFWLRQ FDSDFLW\ RI &0+ LQ WKH 760& SODQW LQFOXGLQJ VDIHW\
GHVLJQ LQ FRPSOLDQFH ZLWK LQWHUQDWLRQDO K\GURJHQ VDIHW\ GHVLJQ VWDQGDUGV WKH SRVLWLRQ RI WKH K\GURJHQ R[\JHQ YHQW
SLSHOLQH LV DOVR FRQILJXUHG E\ VLPXODWLQJ WKH HPLVVLRQ FRQFHQWUDWLRQ VRIWZDUH DQG ILQDOO\ OHDUQHG E\ FRS\LQJ WKH
H[SHULHQFH RI WKH JDV SODQW $W WKH VDPH WLPH UHTXHVW VXSSOLHU KDYH GHGLFDWHG RQ GXW\ LQ 760& SODQW DQG SURYLGH
WKHP ZLWK UHOHYDQW HPHUJHQF\ RSHUDWLRQ WUDLQLQJ WR HQVXUH WKDW WKH V\VWHP FDQ EH VDIHO\ LQWURGXFHG DQG WKH SURGXFW
TXDOLW\ FDQ DOVR PHHW WKH VWDQGDUGV
Keywords 6WUHDP 0HWKDQH 5HIRUPHU 0H2+ &UDFNHU (OHFWURO\VLV
FACILITY JOURNAL 12 2022 3