Page 76 - Vol.48
P. 76
Tech
Notes
Н
TSMC / FACILITY PUBLISHED
VOL.48
↗⨡
URL.http://nfjournal/
廰垻䣉⇾㏼㯿㫲&2'℈㳙䨔䐣⊈䏝䄧䮹䰯弉帇䩟䋄
&2' 5HGXFWLRQ 6WUDWHJ\ DQG %LRORJLFDO 6\VWHP 2SHUDWLRQ 0DQDJHPHQW LQ
$GYDQFHG 3URFHVV 3ODQWV
㗘ɞ⒄Ⱬ剙 㟨‛濞 殠ὃ⑬ɞ⑁⎨⼱〉Ṕ愹ɞ
㌖堿 $EVWUDFW
曹⎛ⱟ欥↙悃奎䩜䛍Ⲧ熂㛇❤ỏ䈶ῐ䕹䛕,3$ ,VRSURS\O DOFRKRO 䕹戠⥸⺖⣯⋱ 1 䵕䄋1 奎䩜䛕 ⁞ ˛㚓熂:(7奎䩜Ṿ
◿㩎⽠㛇❤䀦⽠㹖㵨㪰⑁⎱㰥⣯⥫熂㮵梯⟜㪰⑁㏣㲅戠⥸ṥ㙤恱㉡,3$剘⇇ἧ䩿梯㏣㲅㹈㏣熂㮵㹈㏣ⱘ峳䏌⼱⎑㖏㶒㲅&2'䀔
&DUERQ 2[\JHQ 'HPDQG 熂偝㹈㏣Ṿ䛕,3$ⱘ恱㉡1 ⼱⎑㖏㶒㲅&2'䵞䯲巖㩪熂❹1 戠䕳⼱熂枳ⱞ㹈㏣戠⣯⋱␛䔁媦㱹㱿䵞䯲
₍Ṝ‿剄 PJ /ẜ奘■條熂婾婙ⱟ↶䕰䊺嚦䑗㈚ⱞ˛
䕰䊺嚦䑗ἶ,3$␛㱹㱿ᾭ䄋䕰䊺䛕⡋崻楛≗熂㑾憞䤄㻡㹌⋱熂ῐ䕰䊺❹⇍㱸䔁⣔Ṿ熂兎悥兼䢮㖙㟭˛) $悜徚❩曛悃墝
⼱↸⼳㲅䶕㉡≗㟡熂≮ᾁ㖏㶒㲅&2'䀔❹㝻嚦䑗Ṝ㝑欩悥 PJ /熂巖≋䯲⊇₍ PJ /˛✱㮵熂揧⯫欩䀔&2'ῗ㻡熂ṷ≗
曟㰆ⱟ↶䕰䊺䵌䷂嚦䑗˛䭽ṑ曟㰆熐ⱟ↶欩曟㝚㪰⼳㲅 $25 ␛6DOL[㵨㼝⢥⼳㲅 /6', 熂兎ῐ㖏㶒&2'䀔⻄➘䀔刻䵕 PJ /
暞剄 PJ /熑䭽ờ曟㰆熐ⱟ↶⑼㱰㝚㪰⼳㲅␛㱹㱿⼳㲅熂ⱟ↶朧ⱘ㖏㶒㲅&2'⇞暞剄 PJ /熂偝ᾗ悜徚ṛ≋䑏0%5䶡⟳␛␌
暵䏘Ṟ䪺䮚■條熂㈚戞㘁媦ᾁⱟ↶䮧䖶˛
㝑熂戮ⱞ䕰䊺䵌䷂悜徚䯲䑗熂悜徚❩曛㔞ᾭ␔㗉˚䢽欥㖊◕悃墝䷤檨≗Ỽ熂⹝㝬ⱘ恪悜徚䷤㯈≗Ỽ䶷㘁奎䩜䛕⼱⎑˛
旃捜婅 ⍧⯉村㱸戠˚㲲㴶㥞䩿˚+)'⑼㱰⼳㲅˚丛ぶ㈚寛˚0%5
:LWK WKH GHYHORSPHQW RI DGYDQFHG VHPLFRQGXFWRU PDQXIDFWXULQJ SURFHVV WKH DPRXQW RI ,3$ ,VRSURS\O DOFRKRO XVHG IRU
ZDIHU GU\LQJ KDV LQFUHDVHG VLJQLILFDQWO\ 1 LV DERXW WLPHV WKDQ 1 SURFHVV 6LPXOWDQHRXVO\ WKH SURSRUWLRQ RI VLQJOH ZDIHU
PDFKLQHV KDV EHHQ LQFUHDVHG LQ ZHW SURFHVV 7KLV W\SH RI PDFKLQH KDV D ODUJH YROXPH RI GUDLQ DQG LV OLNHO\ WR FDXVH PL[HG
GLVFKDUJH RI ,3$ DQG RWKHU W\SHV RI GUDLQ 0L[HG GLVFKDUJH ZLOO FRQWULEXWH WR WKH &2' &DUERQ 2[\JHQ 'HPDQG FRQFHQWUDWLRQ RI
WKH IDFWRU\ GLVFKDUJH ZDVWHZDWHU 7KH ,3$ LQ WKLV PL[HG GLVFKDUJH ZLOO FDXVH WR H[FHHG WKH VWDQGDUG RI &2' RI 6RXWKHUQ 7DLZDQ
6FLHQFH 3DUN %XUHDX LQ 1 IDFWRU\ ,Q 1 SURFHVV IDFWRU\ LW ZLOO IDFH WKH LQFUHDVH DPRXQW RI PL[HG GLVFKDUJH DQG WKH DPPRQLD
GLVFKDUJH OLPLW ZKRVH YDOXH LV UHYLVHG WR PJ / VR WKH GHVLJQ RI ELRORJLFDO ZDVWHZDWHU WUHDWPHQW LV QHHGHG WR VROYH WKLV SUREOHP
,3$ DQG DPPRQLD DUH UHJDUGHG DV WKH QXWULHQWV IRU PLFURRUJDQLVPV 7RJHWKHU ZLWK WKH DGGLWLRQ RI FDUERQ VRXUFHV LQ
ELRORJLFDO WUHDWPHQW PLFURRUJDQLVPV FDQ DFKLHYH GHQLWULILFDWLRQ HIIHFWV LQ DQR[LF HQYLURQPHQW 7KH RSHUDWLRQ WHDP RI ) $
DQDO\]HG WKH FRPSRVLWLRQ RI ZDVWHZDWHU DQG IRXQG WKH &2' FRQFHQWUDWLRQ RI WKH GLVFKDUJHG ZDWHU ZKLFK H[FHHGLQJ WKH OLPLW
RI PJ / LV PJ / ZLWKRXW DQ\ WUHDWPHQW 7KHUHIRUH RXU WHDP IRFXV WKH VRXUFH RI KLJK FRQFHQWUDWLRQ &2' DQG LPSRUW WR
ELRORJLFDO ZDVWHZDWHU WUHDWPHQW LQ GLIIHUHQW VWDJHV
6WDJH 'UDLQ RI DGYDQFHG RUJDQLF ZDVWHZDWHU $25 DQG 6DOL[ VFUXEEHU ZDVWHZDWHU /6', DUH LPSRUWHG WR ELRORJLFDO
ZDVWHZDWHU WUHDWPHQW ZKLFK FDQ UHGXFH WKH DYHUDJH FRQFHQWUDWLRQ RI &2' IURP DERXW PJ / WR PJ / LQ GLVFKDUJH
6WDJH 'UDLQ RI IOXRULQH FRQWDLQLQJ RUJDQLF ZDVWHZDWHU DQG DPPRQLD ZDVWHZDWHU DUH LPSRUWHG WR ELRORJLFDO ZDVWHZDWHU
WUHDWPHQW $OWKRXJK WKH &2' FRQFHQWUDWLRQ LV UHGXFHG WR PJ / LQ GLVFKDUJH WKHUH DUH SUREOHPV VXFK DV VFDOLQJ LQ 0%5
0HPEUDQH %LRUHDFWRU DQG UHPRYDO UDWH RI DPPRQLD LV LQVWDEOH GXULQJ RSHUDWLRQ 7KH LPSRUW SROLF\ VKRXOG EH HYDOXDWHG DJDLQ
)LQDOO\ IRU WKH RSHUDWLRQ DQG PDQDJHPHQW RI WKH ELRORJLFDO V\VWHP WKH ) $ WHDP VKDUH H[SHULHQFH IURP RSHUDWLQJ
SDUDPHWHUV DQG KDUGZDUH LPSURYHPHQW DQG KRSH WR VKDUH RXU H[SHULHQFH ZLWK QHZ SURFHVV IDFWRU\
Keywords &2' &DUERQ 2[\JHQ 'HPDQG 6OXGJH VHHGLQJ +)' +\GURJHQ )OXRULGH 'UDLQ ZDVWHZDWHU (PHUJHQF\
SURFHVVLQJ 0%5 0HPEUDQH %LRUHDFWRU