Page 150 - VOL.53

廠務季刊 Facility Journal 2024

南科再生水廠規劃設計及營運策略
Strategy of Design & Operation For Reclaimed Water Plant

文│蕭千城 李仲弘│綠色製造部

摘要

摘要 台灣四面環海氣候溫暖潮濕年平均降雨量雖然可達 2,400mm 是全球平
均 2 倍，但是降雨時間分布不均且河川坡陡流急，依統計資料可知降雨後
1. 前言
60% 流入大海 22% 迅速蒸發，可以留下使用剩下僅 18%(177 億噸 ) 而
2. 文獻探討 大型水庫容量有限且水庫持續淤積，因此多元用水策略進行導入再生水是
十分重要的，2021 年啟動系統試車，經過長期投入和努力，於 2022 年 9
2.1 國外經驗
月正式啟用，為全球首座回收工業廢水，且應用於半導體製程的工業再生
2.2 國內先期規劃
水廠，2023 年 1 月達成台灣首次將再生水回用至半導體晶圓製程，截至
2023 年 12 月，台積電南科廠區已使用再生水總量 1300 萬噸以上，因此
3. 研究方法
再生水在 2023 的旱季時，維持穩定晶圓生產擔任相當關鍵的角色，並讓
3.1 獎勵投資興建
台積電南科廠區節省自來水達 30%，相當於減少 18.4 萬車次水車運補，
3.2 規劃設計 因此成功發展再生水的技術與應用，達成淨水永續的績效。
3.3 營運規劃 關鍵詞 : 再生水、多元水源
3.4 環境教育設施場所
Taiwan is surrounded by the sea and the climate is warm and
4. 結論及未來精進 humid. Although the average annual rainfall can reach 2,400mm,
which is twice the global average, the rainfall time is unevenly
參考文獻
distributed in a year and the rivers are steep and rushing.
作者介紹 According to statistics, 60% of the rainfall flows into the sea and
22% evaporates rapidly. Only 18% of the rainfall is remaining (17.7
billion tons). Therefore, the introduction of a diversified water-
use strategy to incorporate recycled water is extremely important.
The system was tested in 2021 and, after long-term investment
and effort, was officially launched in September 2022. It is the
world�s first industrial wastewater recycling plant applied in the
semiconductor manufacturing process. In January 2023, Taiwan
achieved its first use of recycled water in the semiconductor wafer
production process. As of December 2023, the TSMC Nanjing plant
has used more than 13 million tons of recycled water. Therefore,
recycled water played a critical role in maintaining stable wafer
production during the 2023 drought season, and the TSMC Nanjing
plant saved 30% of tap water, equivalent to reducing 184,000
water truck transportations. Thus, the successful development
and application of recycled water technology achieved sustainable
water purification.
Keywords : Reclaimed Water, Diversified Water Resources

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