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Figure 2. Block diagram of the swarm-base FLC system

Robot 1

Moving swarm behavior
Robot (i-1) Fuzzi cation Inference engine Defuzzi cation
direction control

Robot (i+1)
Robot(i) ’s deployment
location
Robot (n)

Sensor’s location Robot(i) ’s FLC
and reading

particles. Usually keep the charging
Figure 3. Comparison of D AVE,S(A) and D AVE,S(SMPS)
level as low as possible to prevent
ions repulsion. In other words, DC
measures the quantity of “active”
90
[3]
surface of atom or ion attachment .
Dilution Tunnel Data 1 dn dn
= const
Roadway Data (1/2 Day) S A = √(3kT/m)n dt dt ….....(1)
Loading Dock 04/25/00
Loading Dock 04/28/00
60
Loading Dock 05/01/00 Where SA: Active surface
1:1 Intersection k : Boltzmann constant
D Ave,S(A) (nm) T : Temperature
m : Mass

30 n : concentration of atoms
After the surface concentration and
the total number concentration N
of the particles are measured , we
can assume the aerosol has the same
0
0 30 60 90 surface area concentration and
D Ave,S(SMPS) (nm) calculate the hypothetical mono-
disperse aerosol.

1 0.5
D AVE,S =( πN ) …...................................(2)

of a miniaturized device matrix of response time and high installation
such instruments to form a particle cost so makes it difficult to use in Where D Ave,S : Diameter of a hypo-
detection and alarm system, which the vast territory and changing thetical mono-disperse aerosol
may be established by the formation environment in the cleanroom. Major type of aerosol in cleanroom
of condensation particle counter is nuclei mode. The nuclei mode
(CPC) and the diffusion charging particle size < 100nm can pass
sensor (DC). The device should The Diffusion Charging t h r oug h t he h i g h- e f f ic ie ncy
have high time resolution and Sensor (DC) particulate air (HEPA) filter in the
cover very low concentration range The DC signal is controlled by fan filter units (FFU). The larger
and ultrafine particle diameters. Brownian diffusion, and the current particles exceeding 100 nm for
Standard scanning mobility particle sensor measures the direct diffusion example coarse particle mode will
sizer(SMPS) has relatively slow charging by the surface area of the be removed in the makeup air unit

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