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Figure 12. 2009 R&D 100 Winner, NASA Mini-Classifier [8] Figure 13. Pollution hunting robot fish take to the sea [7]

particle sizer’s (SMPS) mobility, source of particle contamination. [3] Siegmann, K., & Siegmann, H. C.
(2000). Fast and reliable “in situ”
as compared to gradient seeking And the new miniature prototypes
evaluation of particles and their
method, a dynamic ad-hoc network of particle detectors provide a low surfaces with special reference to
c o u ld p e r f o r m c o o p e r at i v e cost solution to make the particle diesel exhaust. SAE Technical Paper
e x plor at ion a nd sh a r i n g t he contaminant tracking system to Series No. 2000-01-1995.
measurement data to get information be feasible. Performance of the [4] M. Fierz a , C. Houle a , P. Steigmeier
a & H. Burtscher. Design, Calibration,
correctly and efficiently with much prototypes was compared in the and Field Performance of a Miniature
lesser sensors. Besides, the swarm- laboratory with differential mobility Diffusion Size Classifier. Aerosol
base fuzzy logic controller (FLC) analyzer (DMA) classified aerosol Science and Technology. 45:1–10,
2011.
approach could extract out the or scanning mobility particle sizer [5] http://www.nyu.edu/projects/xdesign/
incorrect data and strain away the (SMPS) and condensation particle feralrobots/
noises between the communications counter (CPC), the result is satisfied [6] http://www.i-cherubini.it/mauro/
of the nodes. from the aspect of size and cost. We blog/2008/03/17/feral-robots-and-
believe that the nanoparticle real environmental-health-clinic/
P a rt i c l e c o n t a m in a t i o n in time concentration detecting and [7] http://www.reuters.com/
semiconductor fab may occur from source locating system will be put article/2012/05/22/us-robot-fish-
the air supply of the fan filter units into practice in cleanroom in the pollution-idUSBRE84L05U20120522
(FFU), the front opening unified pod immediate future. [8] http://www.rdmag.com/award-
winners/2009/07/aerosol-analysis-
(FOUP) gasket, wafer transfer robot compact-package
joint or even from the metallization
processed wa fer surface. The
source of the particle contaminant
is variant and the behavior of
c on t a m i n a n t pr op a gat ion i s
dynamic, thus it needs a real time References
sampling system tracking particle [1] X. Cui, T. Hardin, R. K. Ragade, and
from the moving robot and the A. S. Elmaghraby. A Swarm-based
sliding hatch gasket. Sometimes the Fuzzy Logic Control Mobile Sensor
Network for Hazardous Contaminants
consecutive action of process will Localization. 2004 IEEE International
accumulate heat and cause thermal Conference on Mobile Ad-hoc and
desorption, static sampling may Sensor Systems.
lead to a wrong direction to reduce [2] N. Bukowieckia, D.B. Kittelsonb,
W.F. Wattsb, H. Burtscherc, E.
particle contamination. Thus we Weingartnera, U. Baltenspergera.
could coordinate a few of scanning Real-time characterization of ultrafine
mobility particle sizers to form a and accumulation mode particles in
ambient combustion aerosols. Journal
flock based on a swarm behavior
of aerosol science 33 (2002) 1139–
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