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表二、四盤管 RAR 切離程序

條件 TCV01 CV1 RAR 泵 TCV04 TCV05 時間

RAR 運轉中 0% On On 0% T4 PID auto

自動切換至手動 , 控
PID 自 0%
RAR 溫控切換 外氣溫度 <18 0% On On 制閥由最後開度 , 慢 360S
開始自動調節
速調節至 0%

RAR 暖機程序 0% On On T4 PID auto 0% 360S

RAR 切離 T1 PID auto Off Off T4 PID auto T0%

TCV05 係控制 RAR 熱回收率的主 Hua, “Capturing energy-
要部件，其它附加功能為：1. 控 saving opportunities in make-
制出風溫度，避免過度回收熱能， up air systems for cleanrooms
2. 增加 RAR 投入與脫離過程溫 of high-technology fabrication
控的穩定度。若不在乎上述 1、2 plant in subtropical climate”,
項，則五盤管/六盤管型RAR的 Energy and Buildings 42
TCV05 可省略。 (2010) 2005–2013
[4] Win-Jet Luo, Yu-Lieh Wu,

四盤管型 RAR 的成功要件 : 需克 “A case study on energy
服切換時在熱盤管內的平衡水溫不 saving of the facility systems
一致及水量突然變化，有賴於操作 for 12-inch semiconductor
者細心調校。 wafer fabs in Taiwan”,
International Journal of the
Physical Sciences Vol. 6(15),
pp. 3597-3607, 4 August,
2011
參考文獻 [5] 蘇鈺洲, MAU Run Around

Coil Assessment Report
2011-11-10
[1] 李明利/周政隆, FTB MECH
Monthly Report- July-2008
[2] Somchai Paarporn, P.E.
“Runaround Loop
Heat Recovery With
Dehumidification System”,
ASHRAE Journal pp.32-38,
June, 1999
[3] Jhy-Ming Tsao, Shih-Cheng

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