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圖四、HCAPN1 機台的擬合磁場衰減距離圖


                                     n=1                                          n=3
                     50                                          50

                     40                                          40

                     30                                          30
                    Magnetic field (mG)  20                     Magnetic field (mG)  20

                     10
                                                                 10
                      0                                           0

                     -10                                        -10
                       -1     0      1      2      3      4        -1     0      1      2      3      4
                                   Distance (meter)                            Distance (meter)
                                      1                                            2




              圖五、HIHIV9 機台的擬合磁場衰減距離圖

                                     n=1                                          n=2
                    100                                         100

                     80                                          80

                     60                                          60
                    Magnetic field (mG)  40                     Magnetic field (mG)  40



                                                                 20
                     20
                      0                                           0
                    -20                                         -20
                       -1   0    1    2    3    4   5    6         -1    0    1   2    3    4    5    6
                                   Distance (meter)                            Distance (meter)
                                      1                                            2






                                                  Mountanin View,                  (IEC).
                                                  CA,1992,1994.
              參考文獻                                                             [3]  筆者曾於 2010 底針對十二廠
                                              [2]  SPR(Special international       四期三樓的各種機台產生的
                                                  committee on radio               磁場大小作過測量,總共測量
              [1]  SEMI E33-94,                   interference) was founded        過 230 個機台 ( 歡迎對機台
                  ”SPECIFICATION FOR              in 1934 to set standards for     EMI 有疑慮的單位來跟筆者索
                  SEMICONDUCTOR                   controlling electromagnetic      取 )。但是無法利用十二廠四
                  MANUFACTURING FACILITY          interference in electrical and   期三樓的各種機台來做磁場強
                  AGNETICCOMPATIBILITY”           electronic devices, and is       度衰減距離實驗,因為十二廠
                  Semiconductor Equipment         a part of the International      四期三樓已無乾淨的電磁波環
                  And Materials International,    Electrotechnical Commission      境。





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