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圖四、HCAPN1 機台的擬合磁場衰減距離圖
n=1 n=3
50 50
40 40
30 30
Magnetic field (mG) 20 Magnetic field (mG) 20
10
10
0 0
-10 -10
-1 0 1 2 3 4 -1 0 1 2 3 4
Distance (meter) Distance (meter)
1 2
圖五、HIHIV9 機台的擬合磁場衰減距離圖
n=1 n=2
100 100
80 80
60 60
Magnetic field (mG) 40 Magnetic field (mG) 40
20
20
0 0
-20 -20
-1 0 1 2 3 4 5 6 -1 0 1 2 3 4 5 6
Distance (meter) Distance (meter)
1 2
Mountanin View, (IEC).
CA,1992,1994.
參考文獻 [3] 筆者曾於 2010 底針對十二廠
[2] SPR(Special international 四期三樓的各種機台產生的
committee on radio 磁場大小作過測量,總共測量
[1] SEMI E33-94, interference) was founded 過 230 個機台 ( 歡迎對機台
”SPECIFICATION FOR in 1934 to set standards for EMI 有疑慮的單位來跟筆者索
SEMICONDUCTOR controlling electromagnetic 取 )。但是無法利用十二廠四
MANUFACTURING FACILITY interference in electrical and 期三樓的各種機台來做磁場強
AGNETICCOMPATIBILITY” electronic devices, and is 度衰減距離實驗,因為十二廠
Semiconductor Equipment a part of the International 四期三樓已無乾淨的電磁波環
And Materials International, Electrotechnical Commission 境。
NEW FAB TECHNOLOGY JOURNAL JULY 2012 53