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Figure 11. Sustainable Design and Construction Framework

Manage Sustainable Design & Construction with Integrated Team

Pick the Right Site
“Get the
Develop an Economic Targets Right” Develop Manage Construction Track Performance
Construction
Strategy Plan to Achieve to Achieve Design
Develop, Evaluate Sustainability &
& Targets Construction Optimize
Implement. Targets Performance
Sustainable Design
Set Sustainable Goals and Targets
“Get the
Details Right” Commissioning
Systems
Develop a Sustainable Master Plan for Design, Develop, Evaluate
Construction, and Operation &
Implement.
Detailed
Sustainable Design
Track and Update the Sustainable Goals & Project Metrics through each step

STRATEGY & CONCEPTUAL DESIGN CONSTRUCTION CONSTRUCTION OPERATIONS &
PLANNING DESIGN DOCUMENTS DOCUMENTS MAINTENANCE

Sustainable integrated so that the final operating The N a n op o l i s f e a t u r e s a n d
capabilities include:
results are tracked and optimized.
Approach - Top level R&D labs
- Stacked cleanrooms
Pilot
Sustainable design trends for Nano/ Manufacturing
MEMS require a comprehensive Case Study - Nano/MEMS/NEMS processing
approach to developing strategies - ISO 5 and 7 cleanrooms
and design and operating features - VC-D and VC-C vibration criteria
As a response to the China’s internal
that provide the broadest range of - E-beam metrology
d e m a n d f o r M E M S a n d n a n o
sustainable features. IDC Architects - TEM suite capability
products, Nanopolis, a research and
has developed a full cycle approach - Remote bulk gas pad
science park located in Suzhou China,
to d ete r m in in g a nd m a n agin g provides the industrial base of Suzhou
sustainable features throughout the
MEMS/nanotechnology as well as the
design and construction phases. Below
first construction project in the region
is an overview of this framework.
for the innovative and entrepreneurial Needs and
The framework diagram Figure 11 deployment of new products.
describes the phases of sustainability IDC Architects was engaged to design Challenges
development, from the establishment a new 6'' MEMS pilot production
of the opti ma l site location to line as a public platform in China
def i n ition of econom ic ta rgets dedicated to R&D, prototyping, A high-technology facility that
to m aster pla n n i ng t he f ut ure processing, packaging and pilot functions for both research and
operations and growth of a research production for internal Chinese development and as a pilot “first-
facility and its operations. Metrics manufacturers. This recent project of manufacture” setting has several
are established with future targets is described here as an example of critical needs and provides the
tied to const r uction mater ia ls the types of facility features that are designer many challenges. This multi-
and implementation. Startup and representative of latest-generation faceted facility must balance the high
commissioning is further linked and nanotechnology facilities. flexibility requirements of research

NEW FAB ENGINEERING JOURNAL MARCH 2015 13