Page 8 - Vol.17

Tech
Notes
技術專文

Figure 1. Laboratory Computational Air Flow Model

Initial Design: Perspective view looking NW into Lab Revised Design: Relocated low-wall return grille

<60 80 100 120 140 160 180 >200
Age of air (seconds)

- Critical Environments
Figure 2. Predictive Summary for Pilot Line Scale Complexity
- Increasingly greater infrastructure
flexibility
- Cost-effective operations Factor Research Development Manufacturing
- Sustainable design features
Approach Single Suite Multiple Suite Open Floor
I n d ust r i a l e n g i n e e r i n g w i t h
architectural design approaches, Area Criteria Critical Critical/Shared Critical/Complex
coupled with the integration of
Critical utilities/m 2 1.0 1.3-2.0 3.0-4.5
key operational requirements, have
proven highly effective in providing a
flexible and technically capable nano/
MEMS infrastructure. Industrial
engineering activities are applied
for facilities of this kind to identify
and organize processes, research and
pilot equipment requirements, and
evaluate materials flow and handling,
including overall facilities planning.
The integration of such activities with
architectural planning for occupancy,
codes, functionality, form, sustainable maximize space flexibility, extended Research to
practices, advanced design tools and v ibrat ion a nd e lect romag net ic
predictive modeling have attained interference (EMI) control strategies, Pilot
significant results. bio-nano-MEMS integration, critical
systems, critical characterizations, Production
acoustics and the latest improvements
in the use of computational fluid Challenges
dy n a m i c s a i r f l o w m o d e l i n g
Trends and applications to optimize energy There are a number of approaches
Design Issues efficiency and airborne molecular for accommodating latest-generation
contam ination control. A br ief
nano/MEMS research facilities to
discussion of some of these factors
specialized methodologies such
follows.
Speci fic desig n trends i nclude as Lithographie, Galvanoformung,
modular space configuration to A b f o r m u n g ( L I G A) u t i l i z i n g

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