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Tech
Notes
技術專文
Abstract This article is to describe the architectural design approach to the latest-generation nano/MEMS
research facilities. It mainly respond to critical environments, increasingly greater infrastructure
flexibility, cost effective operations and sustainable design features. It is a blend of technical
competencies for architectural and engineering solutions with the aid of advanced planning tools,
analysis and computational techniques. In the last, a case study will also be provided to show the
real application.
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