Page 105 - Vol.48
P. 105

TSMC / FACILITY PUBLISHED
                  VOL.48
                                                          ⶞↗⨡⃈

                                                            URL.http://nfjournal/

                  涜㫝ノ㔴 ⶠ㫩㫝怶帇垻ノ㨡ᾷỺ㔴䚱
                  7UDQVIHU :DVWH +LJK &RQFHQWUDWLRQ +) WR $ +LJKO\ 9DOXH 3URGXFW  &U\ROLWH

                                                                                                   㗘ɞ㟨ᾢ⍄ɞ⑁Ṿ⼱〉✬愹ɞ

                  ㌖堿   $EVWUDFW
                      ⼱〉㍒仝㏹⌦⿻䔁䷤䀰熂剅⋬ⱘ奎䩜䕳䕰䛕⼳㤕崘㻡⇞奎䄋䗁㦾⑀ῐ䕹䛕䕳┒熂曹咨↙悃奎䩜䛕㽥悃 1 a 熂村垦⊌␛㹖㾥䛕
                  㭲㗉⣯⋱熂ⱟ剅㱼㱰應村㲓戠⥸⺖ṛ⎘熂Ằ⣯⋱ỗ㱼㱰應䛕⼳㸃戠熂桡ᾁ    ⻅ⱘ悥     ⛉ 㝙熂ᾥ↹↽⑉䛕   熂ṑ剚廞⎘剄↽
                  ⑉䭽ờ⥸⼳㤕䊺˛✱㮵㝽䡥䫇㘍    ⻅ 㝙㉡⋰㘍)  %⼱▰䕹槧⻸˥㱼㱰應⼳㸃⑙㉡∁㛇䡄䵌䷂˦熂ⱘ㱼㱰應⼳㸃⑙㉡䄋挒⸶㦾㊑
                  村䛕欩䵥⻷∁㛇䡄˛
                      ❹偔戠䑏㴒⼱⎑ẜ)RRWSULQW␛㩤㟐欩⻷䛕暡⊇Ṝ熂㎹㤕ἶ℄䷂㶒欥⍧⻛熂ṥ⇇村㲓悃㶒䀔⻷桙㏸⊇㘍  熂Ṟ䭷䑏㴒)  䛕+)䀔
                  ⻷   a    熂✱㮵㝽䡥䫇惉䕹∁㛇䡄㴦ῗ悃墝欩䀔⻷㱼㱰應 +)& 徚奎㉡㝚⅊䕳┒䛕旜䛍␛婾婙˛㱼㱰應⼳㸃₫䄋∁㛇䡄奎䩜䛕⏰
                  㗪熂㢊㔫⼱⎑㱼㱰應⼳㸃䛕䀔⻷村㲓熂剘⼱▗⑙ᾭ䡥䛍≋⑀䕰㉡∁㛇䡄䛕欩䵥⻷䛕挒應䵞嘶⋢熂⇞㑾憞悺䗇䛕㔞ᾭ␔㗉暞ᾟ␞㈚
                  㻼⻷熂㉡⋰ῐ㱼㱰應⼳㸃⑙㉡䄋欩䵥⻷∁㛇䡄熂Ṟ№↜㝞✱䩑戜⼳㸃㊑村䛕婾⃪䫋旤暡⊇熂⑀䝅㏶㘍⼱↸䕰䕳熂❹➁䡥䛍䛕␞㈚
                  嘶⋢ỷ㐡⎘❜↸⿻䔁䷤䀰䕳㦾䛕⇞䕰㋑墤˛
                      )  3 婾便ẜ∁㛇䡄䵌䷂熂䵌䷂悜徚剄    ⻅ 㝙婙䯨熂⹃㉡⋰␌⍧⇂      WRQ +)&熂ṷ徚奎㉡∁㛇䡄⇂   WRQ熂ⱘ⑙㉡ẜ∁
                  㛇䡄⨥䖂⥸曉❜Ⰷ彦戢ⲽ崻戠䜴㏸㫳㹽Ṿ〔㫳檨熂䛗⑀悥⊁Ṿ❜⥸曉欩≗⮡∁㛇䡄䛕❜Ⰷ㩪㻧 &+  ㉧&+   熂㝽䡥䫇戮ⱞ媷‶␛悜
                  徚曟㰆悾悘⊁⇂  桖䛕/ /熂ṷⱞ㘍⧓∁㛇䡄㸃⍧熂␞㈚㩎↸䶡㛇熂+) RXWJDVVLQJ䮚䛕Ẍ姒■條悃墝㏳婟熂㐡≋⑀墝䛕ⱞ䮧熂㐡Ῥ
                  䶷㝻ῗ㘁⽋⼱婾婙␔偔˛

                  旃捜婅   ⿻䔁䷤䀰˚㱼㱰應˚∁㛇䡄

                      7KH IDFLOLW\ FRQWLQXHV WR SURPRWH WKH FLUFXODU HFRQRP\  LV FRPPLWWHG WR WKH SURFHVV RI ZDVWH UHVRXUFHV SURGXFHG E\ WKH SURFHVV LQWR
                  SURGXFWV WKDW FDQ EH XVHG LQ GLIIHUHQW LQGXVWULHV  :LWK WKH HYROXWLRQ RI DGYDQFHG SURFHVVHV 1 a   WKH QXPEHU RI HWFK DQG FOHDQLQJ QHHGV
                  WR LQFUHDVH  UHVXOWLQJ LQ D VLJQLILFDQW LQFUHDVH LQ WKH GHPDQG IRU K\GURIOXRULF DFLG  EXW DOVR LQFUHDVHG WKH DPRXQW RI ZDVWH K\GURIOXRULF DFLG
                  ,W LV HVWLPDWHG WKDW LQ      ZLOO UHDFK       WRQV PRQWK  DFFRXQWLQJ IRU     RI WKH FRPSDQ\ ZKLFK ZLOO EH WKH FRPSDQ\ V VHFRQG ODUJHVW
                  ZDVWH  7KHUHIRUH  LQ 6HSWHPEHU       WKLV VWXG\ VXFFHVVIXOO\ ODXQFKHG WKH ILUVW  ZDVWH K\GURIOXRULF DFLG FU\ROLWH V\QWKHVLV V\VWHP  DW WKH )  %
                  SODQW  ZKLFK FRPELQHV K\GURIOXRULF DFLG ZDVWH OLTXLG LQWR KLJK SXULW\ FU\ROLWH UHTXLUHG E\ WKH DOXPLQXP LQGXVWU\
                      8QGHU WKH UHVWULFWLRQ RI FRQVLGHULQJ WKH )RRWSULQW DQG KHLJKW RI WKH FXUUHQW SODQW  WKH WUDGLWLRQDO IOXLGL]HG EHG LV GLVFDUGHG  DQG WKH
                  UHTXLUHG LQOHW IORZ FRQFHQWUDWLRQ PXVW EH FRQWURO     ZKLFK GRHV QRW PHHW WKH +) FRQFHQWUDWLRQ   a     RI )   RI WKH FXUUHQW VLWXDWLRQ
                  VR WKLV VWXG\ VHOHFWV FU\ROLWH PHWKRG WR GHYHORS DQG GHVLJQ KLJK FRQFHQWUDWLRQ K\GURIOXRULF DFLG +)&  LQWR YDOXDEOH SURGXFWV  :DVWH
                  K\GURIOXRULF DFLG DV WKH UDZ PDWHULDO RI WKH FU\ROLWH SURFHVV  DFFRUGLQJ WR WKH FRQFHQWUDWLRQ UHTXLUHPHQWV RI K\GURIOXRULF DFLG ZDVWH OLTXLG
                  LQ WKH IDFWRU\ DUHD  FRRSHUDWH ZLWK 9HQGRU WR GHYHORS D KLJK SXULW\ DOXPLQDWH VRGLXP DJHQW WKDW FDQ V\QWKHVLV FU\ROLWH  DQG WKHQ UHGXFH
                  WKH UHDFWLRQ WHPSHUDWXUH ZLWK DSSURSULDWH RSHUDWLQJ SDUDPHWHUV  VXFFHVVIXOO\ V\QWKHVL]H WKH K\GURIOXRULF DFLG ZDVWH OLTXLG LQWR D KLJK
                  SXULW\ FU\ROLWH  QRW RQO\ WR RYHUFRPH WKH HTXLSPHQWHPSW\ UHVWULFWLRQV UHTXLUHG IRU GLOXWLRQ RI ZDVWH OLTXLG  EXW DOVR WR SURGXFWLRQ GLUHFWO\ LQ
                  VLWH  DQG WKH UHDFWLRQ DJHQW GHYHORSHG ORFDOO\ DOVR HQKDQFHV WKH UHJHQHUDWLRQ WHFKQRORJ\ RI WKH GRPHVWLF FLUFXODU HFRQRP\ LQGXVWU\
                      )  3  VHW RI WKH FU\ROLWH V\VWHP  WKH V\VWHP RSHUDWLRQ XQWLO 0DUFK      FDOFXODWLRQ  KDV VXFFHVVIXOO\ UHPRYHG D WRWDO RI       WRQ
                  +)&  DQG FRQYHUWHG LQWR D WRWDO RI     WRQV RI FU\ROLWH  WKH V\QWKHWLF FU\ROLWH FRPPLWWHH E\ WKH PDLQODQG QDWLRQDO OLJKW PHWDO PDVV PRQLWRU
                  WHVWLQJ FHQWHU  FDQ UHDFK WKH QDWLRQDO VWDQGDUG RI SRO\PHU FU\ROLWH LQ &KLQD &+   RU &+     WKLV VWXG\ IRU WKH WULDO DQG RSHUDWLRQ VWDJH
                  HQFRXQWHUHG D WRWDO RI   PDMRU LWHPV RI / /  DQG IRU VXFK DV FU\ROLWH OLTXHIDFWLRQ  UHDFWLRQ WDQN FU\VWDOOL]DWLRQ  +) JDV RXWJDVVLQJ DUH
                  GLVFXVVHG  DQG IHDVLEOH FRXQWHUPHDVXUHV DUH SURSRVHG  ZKLFK FDQ EH XVHG DV D UHIHUHQFH IRU WKH GHVLJQ RI QHZ SODQWV LQ WKH IXWXUH

                  Keywords   &LUFXODU HFRQRP\  +\GURIOXRULF DFLG  &U\ROLWH


                                                                                              FACILITY JOURNAL        12  2022
   100   101   102   103   104   105   106   107   108   109   110