Page 51 - Vol.48
P. 51

TSMC / FACILITY PUBLISHED
                  VOL.48
                                                          ⶞↗⨡⃈


                                                            URL.http://nfjournal/



                  ᳇㫭䚻䏰㾵ṙょ䮹䰯ᴉ‪∯⍿⩇…士壆⩘乧僅㉠壌

                  7KH VDIHW\ GHVLJQ DQG GHILQLWLRQ RI SXEOLF KD]DUGRXV VXEVWDQFHV SODFHV XVLQJ WKH
                  VXSSO\ GLVSHQVH V\VWHP DQG HQYLURQPHQW RI WULFKORURVLODQH


                                                                                              㗘ɞ䜸⿯㛋 ⒄㗘䒯ɞ⑁⎨⼱〉ụ愹ɞ


                  ㌖堿   $EVWUDFW

                      Ṛ㲀䡎䖃䅈 7ULFKORURVLODQH  7&6 㚀䖂䡎˚㱼␛㲀㊑䶕㉡熂⇇⍧⯉⽠䄋6L+&O 3 熂䄋⎛ⱟ欥䝉昭䕳㦾ῐ䕹ẜ戞姒⍧⯉┒˛✱⇇⇈⑀
                  䈔へ˚䧒㲅へ˚㰣へ剘冡垦へ䮚䊺⍧䋊へ熂㖖⇇ῐ䕹⢅㊑䛕惉⯫˚㷙暃憞便剘Ῥ㈚䔁⣔ẜ婾婙䛗村䭷⑙˥↽⇂⏂曻䊺┒␛⑀䈔へ
                  欩⤤㱴欥婾便㩪㻧㛹⯚↹䯲䑗忷㴦˦␛˥⑕梯⢅㊑㷙暃⯚↹婾⃪婾便㩪㻧˦熂⇇Ṿ7&6Ῥ㈚䵌䷂䝉昭⯚↹央便ẜ婾便ỷἶ㮵姠䰕⽇
                  ᾉ婾婙熂㝽㗘ἶ)DE   3 䄋῜悃墝㏳婟熂ṷ⯫俺7&6Ῥ㈚䵌䷂婾婙ẜ㩲⟜熂ἶῬ㝻ῗ⼱⎑姠⋔㩪㻧˛

                  旃捜婅   Ṛ㲀䡎䖃䅈 7ULFKORURVLODQH  7&6 ˚↽⇂⏂曻䊺┒˚䧒㲅へ䊺┒

                      7ULFKORURVLODQH 7&6  LV FRPSRVHG RI VLOLFRQ  K\GURJHQ DQG FKORULQH  ,WV FKHPLFDO IRUPXOD LV 6L+&O 3   ,W LV DQ LPSRUWDQW FKHPLFDO
                  XVHG LQ VHPLFRQGXFWRU UHODWHG LQGXVWULHV  %HFDXVH RI LWV SK\VLFDO DQG FKHPLFDO FKDUDFWHULVWLFV VXFK DV IODPPDELOLW\  ZDWHU UHVLVWDQFH
                  WR[LFLW\ DQG FRUURVLRQ  WKH VHOHFWLRQ RI LWV IDFLOLW\  ILUH SURWHFWLRQ HTXLSPHQW DQG VXSSO\LQJ HQYLURQPHQW GHVLJQ PXVW FRPSO\ ZLWK
                  WKH  3XEOLF +D]DUGRXV 0DWHULDOV DQG )ODPPDEOH 3UHVVXUL]HG *DVHV (VWDEOLVKPHQW 6WDQGDUGV DQG 6DIHW\ &RQWURO 5HJXODWLRQV  $QG
                   6WDQGDUGV IRU ,QVWDOODWLRQ RI )LUH 6DIHW\ (TXLSPHQWV %DVHG RQ 8VH DQG 2FFXSDQF\   WKH VHWWLQJ RI VDIHW\ GHYLFHV UHODWHG WR WKH 7&6
                  VXSSO\ V\VWHP LV DOVR GHVLJQHG EDVHG RQ WKLV VSHFLILFDWLRQ  7KLV DUWLFOH WDNHV )DE   3  DV DQ H[DPSOH WR GLVFXVV  DQG GHILQHV WKH
                  PRGHO RI 7&6 VXSSO\ V\VWHP GHVLJQ IRU IXWXUH IDFWRU\ DUHDV SODQQLQJ VWDQGDUGV

                  Keywords   7ULFKORURVLODQH  3XEOLF +D]DUGRXV 6XEVWDQFHV  6XEVWDQFHV ZKLFK LQ FRQWDFW ZLWK ZDWHU  HPLW IODPPDEOH JDVHV



                      ℋ墾

                      ⎛ⱟ欥䕳㦾ẜ奎䩜⥫㷚␛奎恱˚Ↄ⮩㉧嚦䑗⥸戠ṥ㙤                        ㈚❹奎恱˚Ↄ⮩㉧嚦䑗⢅㊑ἶ⯚↹㘊㴦悃墝Ↄ⮩㉧嚦䑗˛˦
                  䈔˚㙤䉗ẜ⏂曻䊺┒熂ṥ奎䩜㊑ῐ䕹ẜ⍧⯉┒䩿梯˚婾⃪剘                         偝⇇䰕❞剘≗梯婓⯫˥↽⇂⏂曻䊺┒␛⑀䈔へ欩⤤㱴欥婾便
                  ㋑墤曹咨Ṟ⑝䛕䕳┒䩿梯Ṟ㘈㏹曄≋㘁熂⏂曻䋊へỷ曹ẜ偝                         㩪㻧㛹⯚↹䯲䑗忷㴦˦⇂≗䄋 梯熂㝽㗘ẜ7&6⏄㯉梯㘍˥䭽
                  奘札⍧熂⧓Ῥ㈚婾⃪῜墝へ‮楛㝻⧶◕䷾寈㉧Ἃ┲㔞ᾭṞ                           梯ẜ䛍䂼へ❋欥˚䛍䂼へ㸃欥␛䧒㲅へ䊺崻˦熂偝嫃䮚⢅㊑
                  䗇熂㝅䕫剄⥺䆇䃎Ⰴⱟ剅䝅㏶㉧旤㏶⿂桐熂⏄㙤恱㉡㵺㽠˚                         㷙暃⯚↹婾⃪ẜ婾便⊘΅㴦姠˥⑕梯⢅㊑㷙暃⯚↹婾⃪婾便
                  䂼䃎˚↽℈䮚↽⯚Ờ㖖熂恱㉡䕰Ⓨ˚峲䕳戞⥸㑞⦂˛⏂曻䊺                         㩪㻧˦䭽✬丹↽⇂⏂曻䊺┒䮚⢅㊑㷙暃婾婙␛㷙暃⯚↹婾⃪
                  ┒ẜ㸆唜䰕䗘䕫⼴熂❜Ⰷ㩪㻧㊑⯫俺ẜ˥⏂曻䊺┒˦–ⲽ⼴                         ῗ婾婙˛
                  俺へ崻熂␻姒ⱞἋⓎ˚₶⼈˚䔁⣔㝚Ⰴ熂⇇⏂曻へ⍖㌽㙤䈔                            ṛ恁戮ⱞ↽⇂⏂曻䊺┒␛㷙暃⯚↹婾⃪ẜ姠䰕Ⅹ䯲曹咨
                  へ˚㱸⍧へ˚⽦䂼へ˚䛍䂼へ˚䧒㲅へ˚䉗䄉へ˚冡垦へ䮚                         ⥫㭲‿㴦⹃巹怢⯝㗅熂ᾗ⦨䕹❹Ṟ⑝䛕Ῥ㈚䵌䷂἞㝔㝚㴦姠
                  䮚➘ⲽẜ熂偝˥↽⇂⏂曻䊺┒˦– 暡㘍㸃欥㉧❋欥熂ṥẌ                         娴戜ṛ䛕䗢ㆿ熂㝽䰘ἶ⑁䪞杌)DE   3 ⼱⎑㊑⽋便ẜ7&6Ῥ㈚
                  姒ⱞ岲䄋⋺䈔˚㙤䈔㉧㙤䉗䊺崻熂⇇Ṿ❹㷙暃㪰昭㭛峽愹                          䵌䷂␛ṑ剽嚦䑗⢅㊑䄋῜熂㏳婟䔁⣔㷙暃婾⃪˚Ῥ㈚䵌䷂⯚
                  ≗熂㷙暃㴦䭽  㣮婓⯫熐˥↽⇂⏂曻䊺┒␛⑀䈔へ欩⤤㱴欥                        ↹へ央便␛Ῥ㈚㊐❰⽋婾婙熂寤㝻ῗ㘁㕅↖ẜ⼱⎑兎΅㮵㩪
                  ㈚΅⇇Ⰺ⚹˚央彚␛㑽悜㘊㴦悃墝⯚↹㑽悜熑悥䯲⊇戠㚓熂                         㻧悃墝姠⋔熂ṷἶ㮵῜㐡Ῥ䶷㘳婾⼱⎑␔偔␛娴㟡熂㝚⋺㘍


                                                                                              FACILITY JOURNAL        12  2022
   46   47   48   49   50   51   52   53   54   55   56