Page 83 - Vol.48
P. 83
TSMC / FACILITY PUBLISHED
VOL.48
↗⨡
URL.http://nfjournal/
%LR $&) %$& ㄾ圑ょ䏦㑺ⶠ㫲70$+㺁ⵤ㳙悍ᴉ㤝僅䛒䤴
%LR $&) %$& V WHFKQRORJ\ DSSOLHG GHFUHDVLQJ 70$+ RI WKH HIIOXHQW ZDWHU
㗘ɞ愾悺䒭 㟨㚂⽈ 啲⅕卓ɞ⑁⎨⼱〉ụ愹ɞ
㌖堿 $EVWUDFW
✱↹䑔⎛ⱟ欥剘↚杌㦾唽⌔䛍Ⲧ熂⥸戠ῐ䕹㱼㱸⍧✬䖃⡋克 70$+ 检⿂⋢˛㝽㗘Ṿ㐡⊁℄䷂㪊兓⑀ἶ㝚㖙⒉暕欩䀔
70$+熂ᾗⱞ㘍ᾟ䀔70$+嚦䑗㖙䜛ᾟ熂ⱟ剅㖏㶒㲅70$+朧䭷❣⎑䵞䯲㩪㻧⏌㝻悥(6*㏣㖏䜿㩪 PJ / ˛⼱⎑↸䛍䑏應
滍⼳㲅✯㖇䵌䷂ $:5 㶌へ䤄⢥⇈㝚70$+暞娴⋰兎熂䄋㮵⽋䬜Ⱡ⟜㶌へ䤄媷檨㩲䶕悃墝70$+䀔媷檨剘吝䝉≗㟡熂㏳䫇⑀兎
暞娴㪰⊇˛偝吝䝉≗㟡剘㲅崻㫳㹽Ṿ䤋⯫70$+暞娴㪰⊇⑀䖂䕰䊺㶌へ䤄 %LR $&) ⱘ70$+徚㐬㉡㱹㱿熂❹㩲䶕ⰷ檨Ṿ䛍䑏ᾟ
䀔70$+暞娴䏘⑀悥 熂ᾗ欩䀔70$+✱⇈㝚䕰䊺㰣へṷṞ悺䕹䕰䊺嚦䑗˛㝑熂䶡℄䷂㪊兓剘%LR $&)ᾭ䕹熂⸶⼱㖏
㶒㲅70$+䀔䖂 PJ /暞剄 PJ /ἶṜ熂悥⊁(6*䜿㩪熂ṷ㘍㗘㝼㐡≋䕰䊺暞娴㣮剘%LR $&)㋑墤㈚䕹剘㍢㊁熂㍒仝㝮③␜
◕䕰㆜惒悃˛
旃捜婅 㱼㱸⍧✬䖃⡋克˚應滍⼳㲅✯㖇䵌䷂˚吝䝉≗㟡
'XH WR WKH IORXULVKLQJ GHYHORSPHQW RI WKH JOREDO VHPLFRQGXFWRU DQG RSWRHOHFWURQLFV LQGXVWU\ D ODUJH DPRXQW RI KLJKO\
WR[LF WHWUDPHWK\ODPPRQLXP K\GUR[LGH 70$+ GHYHORSHU LV XVHG 7KLV DUWLFOH PHQWLRQV WKDW WUDGLWLRQDO UHVLQ LQ SODQW IDFLOLWLHV FDQ
HIIHFWLYHO\ DGVRUE KLJK FRQFHQWUDWLRQV RI 70$+
+RZHYHU WKH WUHDWPHQW HIILFLHQF\ IRU ORZ FRQFHQWUDWLRQ 70$+ LV ORZ UHVXOWLQJ LQ 70$+ GLVFKDUJH ZDWHU WKDW FRPSOLHV ZLWK
WKH SDUN PDQDJHPHQW VWDQGDUGV EXW GRHV QRW PHHW WKH (6* WDUJHW PJ /
,W ZDV IRXQG WKDW WKH $FLGLF DQG $ONDOLQH :DVWHZDWHU 5HF\FOLQJ 6\VWHP $:5 DFWLYDWHG FDUERQ WRZHU $&) LQ WKH SODQW KDV
70$+ GHJUDGDWLRQ IXQFWLRQ 7R WKLV HQG D VPDOO $&) WHVW PRGXOH ZDV HVWDEOLVKHG WR FRQGXFW 70$+ FRQFHQWUDWLRQ WHVWV DQG
PLFURELDO DQDO\VLV
([SORUH SRVVLEOH GHJUDGDWLRQ PHFKDQLVPV ZKLOH PLFURELDO DQDO\VLV DQG ZDWHU TXDOLW\ WHVWLQJ GHWHUPLQHG WKDW WKH 70$+
GHJUDGDWLRQ PHFKDQLVP FRXOG EH WKH FRQYHUVLRQ RI 70$+ LQWR DPPRQLD QLWURJHQ E\ WKH %LR $&) ELRORJLFDOO\ DFWLYDWHG
FDUERQ ILOWHU %\ WKH DQDO\VLV RI GRFXPHQWV DQG ZDWHU WHVWLQJ LW ZDV GHWHUPLQHG WKDW WKH GHJUDGDWLRQ PHFKDQLVP RI 70$+
FDQ EH FRQYHUWHG LQWR DPPRQLD QLWURJHQ E\ ELRORJLFDOO\ DFWLYDWHG FDUERQ %LR $&) ,Q WKH H[SHULPHQW LW ZDV IRXQG WKDW WKH
GHJUDGDWLRQ UDWH RI ORZ FRQFHQWUDWLRQ FDQ DFKLHYH EXW KLJK FRQFHQWUDWLRQ LV QRW DSSURSULDWH E\ ELRORJLFDO WR[LFLW\
)LQDOO\ ZH FRPELQHG ZLWK WUDGLWLRQDO UHVLQ DQG ELRORJLFDO DFWLYHG FDUERQ %LR $&) WKH FRQFHQWUDWLRQ RI 70$+ LQ WKH IDFWRU\
HIIOXHQW ZDV UHGXFHG IURP PJ / WR EHORZ PJ / UHDFKLQJ WKH (6* WDUJHW $W WKH HQG RI WKH DUWLFOH WKH ELRGHJUDGDWLRQ DQG
WKH FKDOOHQJHV RI ELRDFWLYDWHG FDUERQ ZHUH SURSRVHG
Keywords 7HWUD PHWK\O $PPRQLXP +\GUR[LGH $FLG %DVLF :DVWH :DWHU 5HFODLP 6\VWHP 0LFURELRPH $UUD\
ℋ墾
❜↸⥸䨢⯉❣⎑ἶ枳㟐↚杌㦾剘⎛ⱟ欥奎恱㦾䄋⥸⯨ 㱸⍧✬䖃⡋克 7HWUD PHWK\O DPPRQLXP K\GUR[LGH 70$+ 熂
Ẍ欥熂❹ⅻ勀㋑墤䛍ⲦṜ䕳₍≨ṧ䖝⊞卖熂㉡䄋⑁䂴戞姒 ⇈㝚ぶへ䷤䛿㰣へṥ䅲㝚㖙娴㰣⋢熂姐↔ ⻅㝏䛍䕰Ἃ┲
> @
䷤䀰㍘㩪˛䝉昭䕳┒奎ᾭ悟䩜Ṿ熂村ῐ䕹⥸戠㝚㪰奎䩜⏰䊺 ✱悾70$+⼳㸃⛅䁋ⱟ剅Ἃ┲㯌Ỳ㢙 熂剅Ⓨ㰣へ⹃䆇㉡䄋
㗪熂⇇Ṿ检⿂⋢䄋Ẍ姒⏰䊺㗪ẜṑ熂Ẍ姒㉡≗䄋欩⏂曻へ㱼 欩䨢㋑㦾棹曻⮩❹熂㖖䔁⣔㏣㖏㘊枳桙⽋便ⱙ旑䵌䷂嚦䑗⼳
FACILITY JOURNAL 12 2022
