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New
Vision
新象新知
Journal of Thermophysics，Vol 38，N.108，2017.
[12] Toshihiro Tsuji、Toru Oizumi、Nobuo Takeda，Temperature
compensation of ball surface acoustic wave sensor by
two-frequency measurement using undersampling，
Japanese Journal of Applied Physics，Vol 54，N.7S1，2015.
[13] Funke, H. H., Grussom, B. L., McGrew, C. E., Raynor, M. W.,
〝Techniques for the measurement of trace moisture in
high-purity electronic specialty gases,〞 Review of Scientific
Instruments 74, 3909, 2003.
[14] Cadet, G., Valdes, J. L., Mitchell, J. W., 〝Ultrasonic
time-of-flight method for on-line quantitation of semicon
ductor gases〞, IEEE International Ultrasonics Symposium,
295-300, 1991.
圖19、分析流程規劃(資料來源 : 本文整理)
5.2 未來展望..
特殊氣體供應系統品質要求越趨嚴格，增加品質的眼
睛儼然成為技術突破的關鍵。藉由特殊氣體品質快篩系統
讓鋼瓶上線前能再次確認供應的氣體是否有異常，為品質
做最嚴格的把關，避免品質異常造成的巨大損失，也提升
現場人員更換鋼瓶效率和鋼瓶供應效率，為廠務與製程帶
來革命性的進步。
參考文獻
[1] K. Yamanaka, H. Cho and Y. Tsukahara, Appl. Physics Lett.76
2797-2799(2000)。
[2] Yamanaka, Cho, Tsukahara,US2000-14, pp. 49-56 (2000).
[3] 劉俊男、巫幸峰、黃介然，特殊製程氣體之品質監測系統開發，
廠務季刊，Vol 31，2018。
[4] Nobuo Takeda、Paul Carroll、Yusuke Tsukahara，Trace
moisture measurement in natural gas mixtures with a single
calibration for nitrogen background gas，Measurement
Science and Technology，2020.
[5] Takamitsu Iwaya、Shingo Akao、Tatsuhiro Okano，Dynamic
calibration method for trace moisture analyzer based on
quick response of ball surface acoustic wave sensor，
Measurement Science and Technology，2020.
[6] Kazushi Yamanaka、Shingo Akao、Nobuo Takeda，
Background gas analysis with leaky attenuation in a trace
moisture analyzer using a ball surface acoustic wave sensor，
Japanese Journal of Applied Physics，2019.
[7] Yusuke Tsukahara、Osamu Hirayama、Nobuo Takeda，A
Novel Method and an Equipment for Generating the
Standard Moisture in Gas Flowing through a Pip，Vol 31，
N.10，Sensors，2018.
[8] Toshihiro Tsuji、Toru Oizumi、Hideyuki Fukushi，Develop
ment of ball surface acoustic wave trace moisture analyzer
using burst waveform undersampling circuit，Review of
Scientific Instruments，Vol 89，N.5，2018.
[9] Toshishiro Tsuji、Shingo Akao、Toru Oizumi，Moisture
adsorption desorption characteristics of stainless steel
tubing measured by ball surface acoustic wave trace
moisture analyzer，Japanese Journal of Applied Physics，Vol
56，2017.
[10] Kazushi Yamanaka、Shingo Akao、Nobuo Takeda，
Simultaneous measurement of gas concentration and
temperature by the ball surface acoustic wave sensor，
Japanese Journal of Applied Physics，Vol 56，2017.
[11] Yusuke Tsukahara、Toshiro Tsuji、Toru Oizumi，A Thermo
dynamic Consideration on the Mechanism of Ultrasensitive
Moisture Sensing by Amorphous Silica，International
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