Page 52 - Vol_51

廠務季刊 Facility Journal 2023

固態污染物_去除效率精進改善
Improving the Removal Efficiency of Particulate Matters

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文││吳俊賢 劉冠宏 │ 台中廠務三部 十五 B 廠工安衛生部

摘要

摘要 F15B 空污排放標準除須符合半導體製造業相關法規外，
亦須符合環境影響評估法及科管局之核定總量。因 2021
1. 前言
年產能增量 30%，推估硫酸、氫氟酸、鹽酸排放總量
2. 文獻探討 會超過環評及科管局限值。本研究於不影響產能之條件
下，將現址式防制設備導入二流體技術進行改善，康肯
2.1 微粒捕捉理論
KT1000FA 之微粒排放量由 18.0mg/min 下降至 1.1mg/
2.2 粒狀污染物防治技術 min，去除效率改善 94%；台禹 IPI-SGA-310B+ 之微粒
排放量由 99.6mg/min 下降至 14mg/min，去除效率改
3. 實驗方法
善 86%。
3.1 目標污染物分析
關鍵詞 : 現址式防制設備、固態微粒、鹽酸、氫氟酸
3.2 文氏管
The F15B emissions standards for air pollution must
3.3 濕式旋風集塵器 comply with relevant regulations in the semiconductor
manufacturing industry, as well as with the approved
3.4 二流體噴頭
total amount under the Environmental Impact
4. 結果與分析 Assessment Act and the Science and Technology Policy
Research and Information Center. Due to a projected
4.1 氫氟酸永久對策 - 強化微粒捕捉能力
30% increase in production capacity in 2021, it is
estimated that the total emissions of sulfuric acid,
4.2 鹽酸永久對策 - 強化微粒捕捉能力
hydrogen fluoride, and hydrochloric acid will exceed
5. 結論 the limits set by the Environmental Impact Assessment
Act and the Science and Technology Policy Research
參考文獻
and Information Center. This study improved the on-
site pollution prevention equipment without affecting
作者介紹
production capacity, resulting in a 94% improvement
in removal efficiency for particulate emissions from the
Kanken Techno KT 1000FA, reducing the particulate
emission rate from 18mg/min to 1.1mg/min. The
particulate emission rate from the Integrated Plasma
IPI-SGA-310B+ was reduced from 99.6mg/min to 14mg/
min, with an 86% improvement in removal efficiency.
Keywords : local scrubber, particulate, hydrochloric acid,
hydrofluoric acid

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