Page 77 - Vol.13

Compact and Unique Fab Design

ince the clean room floor area is very precious, process tools are located back to back to
form a working bay, which is surrounded and restrained by AMHS system. Within the
Sworking bay, there is very limited space for equipment engineers to operate, especially
within tool back to back aisle, since tool length would be different as designed by different
tool suppliers. Tool side by side aisle could be more luxury because chamber upper-lid may
not be allowed to open in a lifted-up aside type. Therefore, it is really a dilemma in saving
footprint and easy maintenance when designing the assistant kits.
As process tools get bigger and taller, Fab design will face the other dilemma. Since the total
weight of AMHS will naturally increase at least 156%, the vibration will be more serious as
Fab getting higher at the same time. Earthquake impact and micro-vibration will result in a
severe disaster if there is no seismic damper and active anti-micro vibration design. 450mm
Fab design will totally isolate shell structure and interior structure to avoid vibration from
air blowers, AMHS noise and gust from typhoons. This isolation can also eliminate some
shear stress from shell structure as earthquake happens. Fab micro-vibration from interior
structure might be caused by pumps, motors, hoisters and cooler compressors. 450mm Fab
will install active anti micro-vibration devices to lower the impacts to sensitive tool like
lithography tools.

Courage of Engagement

t is not surprised to find out all kinds of materials and process methods are ready and
mature enough in 300mm era, and then people might ask what the deficiency of the
Iindustry is that it could not give birth to 450mm era sooner? Entrepreneurship could be
the answer!

參考文獻
[1] Rapoport BI, Kedzierski JT, Sarpeshkar R (2012) A Glucose Fuel Cell for Implantable Brain–
Machine Interfaces. PLoS ONE 7(6): e38436.
[2] Masaharu Watanabe and Scott Kramer (2006) 450 mm Silicon: An Opportunity and Wafer
Scaling. The Electrochemical Society Interface · Winter.
[3] 300mm and 450mm Forecast Model – silicon edition -1202, IC Knowledge LLC (2012)

NEW FAB ENGINEERING JOURNAL MARCH 2014 77