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圖 12、換瓶自動防呆系統作動機制

Control method:

Air No Air No Air Air

Auto guard close Auto guard opoen

流量後加裝適當孔徑限流墊片。氣 參考文獻
櫃軟、硬體部分，最重要的是必需 [1] Koda, S. (1992). Kinetic aspects of
oxidation and combustion of silane and
加裝高壓雙隔離閥作為高壓段雙隔
related compounds. Progress in Energy
離、減少 89% 沖吹氣體使用量與 and Combustion Science, 18, 513-528
[2] Nagi, E. Y., Huang, K. P. P., et al. (2007).
殘氣排氣量，搭配軟體送氣時點
Field tests of release, ignition and
放程序，可有效減緩急冷與震動效 explosion from silane cylinder valves.
process safety progress, 26, 265-282
應，矽甲烷排放處理可用安全性較
[3] C G A G -13. ( 2006) . S t orage an d
高之稀釋排放管路避免燃燒產生二 Handling of Silane and Sliane Mixtures.
Compressed Gas Association, Inc.
氧化矽。人員操作方面，pigtail 加
[4] Michael Visokey, Kathy Meissner, et
裝雙支撐架可有效減緩震動效應之 al. (1995). Comparative Analysis of a
Silane. ESH B001, SEMATECH Inc.
影響。建立氣櫃條碼系統以避免人
[5] Air Products and Chemicals Gas Tech.
員換錯鋼瓶、氣櫃邊與任意步驟更 (2016). Cylinder Valves. Air Products
and Chemicals, Inc.
換。配有軟式偵測吸頭之氦測漏機
[6] Peng, D. J., Chang, Y. Y., et al.(2007)
具操控性佳之優點，使用其進行換 Failure analysis of a silane gas cylinder
valve: A case study. Engineering Failure
瓶後測漏，可避免釀成嚴重工安意
Analysis, 15, 275–280
外。以上諸多大宗矽甲烷鋼瓶供應 [7] Air Products and Chemicals Gas Tech.
系統之安全防禦措施與操作，能降 (2016). A Practical Guide to Restrictive
Flow Orifices . A ir Pr oducts and
低意外事故發生之災害程度，提升 Chemicals, Inc.
系統供應穩定性，造就環境安全 [8] adixen Vacuum Products. (2004).
Operating Instructions. Pfeiffer Vacuum
性。 Inc.

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