Page 87 - Vol.45
P. 87

TSMC / FACILITY PUBLISHED
                VOL.45
                                                         廠務季刊


                                                          URL.http://nfjournal/



                綠色製造-VOC雙轉輪系統處理效率提升與LOW NOx運行參數

                Destruction efficiency promotes with LOW NOx Operational Parameters of Dual
                Rotor VOCs Process System for Green Manufacturing


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                                                                                   文│盧人瑜  楊詠翔 │ 亞太廠務處  台南廠務六部│
                摘要 / Abstract
                    雙轉輪VOC開始使用，目的為提高VOCs的處理效率，降低排放量以利空污減量，廠區內使用廠商分為D公司與J公司，單轉
                輪設計處理效率為95%，雙轉輪設計預計能到達99%以上處理效率，VOCs的排放量減少為單轉輪設計的1/5。J公司處理設備，於
                試車檢核時發現，氮氧化物(NOx)排放量與VOCs處理效率皆不滿足TSMC標準；邀請各廠專家與J公司專家協助檢合、改善硬體與
                系統流程，VOCs處理效率由97%進步至99%，VOCs排放量由34噸/年減至11噸/年，NOx排放量由19.56噸/年減至10.33噸/年，本
                文分享J公司之VOC雙轉輪系統由設計面出發改善至穩定運轉及空污排放減量之運轉參數調整作法。

                關鍵詞 / VOCs、空污減量、NOx減量

                    The purpose of starting using the dual rotors VOC is to increase destruction efficiency and lower the emission released for
                airborne contamination reduction. Presently, the Fab18 of TSMC has used two different vendor makes of VOC devices D and J.
                For the single rotor, the destruction efficiency would get up to 95%. Therefore, the dual rotor design was except to get above
                99% of destruction efficiency, and emission dramatically reduced to 1/5 of the single rotor design. However, vendor company J
                has to fund the NOx, and the device processing efficiency is insufficient of TSMC standard. After being invited by all experts from
                different fab and company J to get inspection check and hardware/software improvement. The VOC destruction efficiency gets
                increased from 97% to 99%, and the emissions are reduced from 34 tons/yr to 11 tons/yr. The purpose of this article is to share
                the way of improvement for company J's dual rotor VOC system and emissions reduction parameter adjustment.

                Keywords / VOCs, Air Pollution Reduction, NOx Reduction




                1.  前言
                    隨著科技進步，環保意識抬頭，其中揮發性有機物                             其中，R=削減率；E=進入污染防制設備前之揮發性有機
                (Volatile Organic Compounds, VOC)與氮氧化物(Nitrogen    物單位小時排放量，單位為kg/hr；Eo=經污染防制設備處理
                Oxides, NOx)更為各環保單位監控污染物，以現行法令為                    後逕排大氣之揮發性有機物單位小時排放量，單位為kg/hr。
                VOCs削減率需大於90%(式1)或排放量<0.6kg/hr，如何做到更                   透過公式可了解到平均處理效率由99%降至98%，表示
                低排放量更是公司努力的目標；揮發性有機物排放削減率(以                        廠區VOCs排放量增加為原來的一倍，更何況處理效率觸至法
                下簡稱削減率)：指揮發性有機物經污染防制設備處理後之排                        定異常排放標準90%，排放量達原本設計的10倍之多；氮氧
                放量削減百分比，依同步檢測污染防制設備前端及後端廢氣                         化物在空氣中會反應形成硝酸，為酸雨之主要成份，目前半
                排放量進行計算(式1)：                                       導體法規限制排放量為15PPM，但地方機關核可之排放量逐
                                                                   年限縮，目前F18A環評限制總排放量為每年35噸；本論文由
                                                             (1)   VOCs雙轉輪處理系統設計面出發，提出先進製程廠區VOCs
                                                                   雙轉輪系統可能面臨之挑戰。


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