Page 92 - Vol.45

Tech
Notes
技術專文

TSMC / FACILITY PUBLISHED
VOL.45
廠務季刊

URL.http://nfjournal/

南京廠空污自主檢測的探索與應用

Exploration and Application of Autonomous air pollution detection in Nanjing
Factory

文│張波│南京廠務部│

摘要 / Abstract

環境問題已然成爲當今全球最重視的話題之一，隨著半導體行業的飛速發展，人們也越來越重視該行業廢氣排放的研究與改
善，但受限於在綫監測儀器的分佈率及成本，實驗手動檢測仍然是空污改善最常用的量測手段。因此南京厰建立廠內空污檢測實
驗室，有效構建起完善的自主檢測能量。但環境檢測技術的真正掌握並非一蹴而就，即使是外部運轉多年的檢測單位仍然存在諸
多手法問題，需要在實踐操作中不斷研究和改善。本文主要針對如何實現質量管控展開研究，在大量的實驗研究基礎上進行經驗
總結，為實驗方法的改進提供參考依據，並借此規範外部檢測單位，降低檢測異常之風險，提高實驗室監測數據的準確性。

關鍵詞 / 空污檢測、環境實驗室、質量管控

Environmental protection has become one of the most important topics in the world today. With the rapid development of
the semiconductor industry, people are paying more and more attention to the research and improvement of exhaust emissions
in this industry. However, manual inspection is still the most commonly used measurement method for air pollution improvement
as it is limited by the distribution rate and cost of online monitoring instruments. Therefore, Nanjing factory has established an air
pollutant monitoring laboratory to effectively build up an independent autonomous detection energy. However, the real mastery
of environmental detection technology is not accomplished overnight. Even the external laboratory that has been operating
for many years still has many technical problems, which need to be continuously studied and improved in practice. This article
focuses on how to improve quality control, summarizes experience based on many experimental studies, provides a reference
for the improvement of experimental methods. The methods of quality control are also aimed to regulate third-party inspection
company, reduce the risk of abnormal detection and improve the accuracy of laboratory monitoring data.

Keywords / Air Pollution Detection, Environmental Laboratory, Quality Control

1. 前言

大陸環保法規日趨嚴格，地方規範及行業標準不斷修正 力聯網監控以實現對工廠運轉狀況實時監控，企業在空污排
[01]
，進一步加強污染物排放管控。南京地區的首要污染物是 放異常時會面臨立即停產整頓的風險。如何構建起廠內的空
臭氧，2020年臭氧污染天數達69天，臭氧污染防治形勢嚴 污防線成為亟待解決的問題。
峻。臭氧污染的形成需要三個條件：20℃以上的氣溫、充分 常規的空污研究多依賴於第三方檢測數據，但檢測手法
[02]
的光照、揮發性有機物(後簡稱VOCs)和氮氧化物污染 。南 參差不齊且花費成本較高，無法滿足空污日常檢測與及時排
京市生態環境局爲了改善臭氧污染，主要針對VOCs實施排放 查需求。南京廠尋求與外部標準實驗室合作，通過參訪學習
管控 [03] 。一方面法規允許排放濃度限值不斷下修；另一方面 及溝通合作，建立起空污自主檢測實驗室，針對空污法規要
環保監管手段除了要求有機排放煙囪在綫監測數據聯網環保 求的15種特徵污染物，實現自主檢測分析。在實驗室實際運
平臺向民衆公示外，還要求企業生產及空污處理設備進行電 轉過程中，不斷總結實驗室質量管控的不足之處，提出針對

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