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圖10、CVD Olympia SiN ALD Dry Pump背壓表現

表6、CVD Olympia SiN ALD LSC Energy & Cost Saving

Power(kW) CDA/N2(LPM)
Before After Saving Saving Ratio Before After Saving Saving Ratio
LSC-A 11.80 0.82 10.98 93.05% 60 0 60 100.00%
LSC-B 13.29 7.62 5.67 42.63%
Hot N2 2.31 0 2.31 100.00% 300 0 300 100.00%
Heating Jacket 4.92 0 4.92 100.00%
Power Consumption(kWh/Yr) CO 2 Emission(Ton/Yr) Cost(NTD/Yr)
Before After Saving Before After Saving Before After Saving
LSC-A 107,637 7,185 100,452 57 4 54 $231,743 $15,470 $216,273
LSC-B 116,420 66,790 49,630 62 36 26 $250,652 $143,799 $106,853
Hot N2 & Heating Jacket 63,353 0 63,353 61 0 61 $339,805 $0 $339,805
213,434 141 $662,931

其次，在Local Scrubber的配置數量上， 5. 未來展望與結論
亦從4台電熱水洗式Local Scrubber減為3.5
5.1 iSystem導入對Local Scrubber的影響
台(LSC-A的備機可與另一台Olympia機台的
LSC-A備機共用)，且新裝機可不需配置加熱 於本文所述藉由確認製程機台使用的製程氣體及其用量，以進一步確認
帶及Hot N 2 裝置，在建置成本上及運轉管理 Local Scrubber所需處理的製程尾氣及處理方式，不但可達成尾氣有效處理
成本上皆可降低。此外，因Local Scrubber的 及節能之綜效，亦可提升Local Scrubber的穩定運轉，並同時達成降低運轉
腔體溫度分別由800℃降至室溫及650℃，對 成本以及降低Local Scrubber副產物對空汙影響的多重效益。此一驗證手法
於Heater的負載及損耗亦可大為降低，此亦 及程序除了應用在本文所述之CVD AMAT Olympia SiN ALD製程，亦應用在
可減少Heater故障處理及零件更換的成本。 其它多個製程的Local Scrubber獲致成效。(表7)

表7、F15B Local Scrubber Energy Saving

Process Process Name Tool Gas Use Tool LSC Gas Handling Method LSC Energy Saving
Brand Q'ty Before After Q'ty Power N 2 Natural Gas O 2 Cost CO 2 e
3
3
3
(kWh/Yr) (m /Yr) (m /Yr) (m /Yr) (NTD/Yr) (Ton/Yr)
CVD AMAT Olympia SiN ALD AMAT NH 3 ,DCS,N 2 ,Ar 9 Thermal-Wet Thermal-Wet 18 1,920,906 1,419,120 na na $5,966,379 1,269
(Temp Reduction)/Wet Only
CVD AMAT LK UV Curing AMAT O 3 ,Ar,He 34 Thermal-Wet Thermal-Wet(Temp Reduction) 34 2,181,512 1,179,108 na na $6,365,042 1,163
ETC TEL Certas OX Etching TEL HF,NH 3 ,Ar,N 2 30 Thermal-Wet Wet Only 58 2,687,076 na na na $5,785,274 1,432
ETC Lam Gamma PR Ashing LAM 4%H 2 N 2 ,O 2 ,N 2 75 Plasma-Wet Wet Only 76 6,054,123 1,597,824 na na $15,095,720 3,505
PVD Curing/Baking HKE H 2 ,N 2 76 Thermal-Wet Needless 76 6,325,099 na na na $13,617,938 3,371
DIF AMAT RTP DPO AMAT O 2 ,Ar,He 4 Thermal-Wet Needless 8 200,905 na na na $432,549 107
DIF Extra Baking TEL N 2 5 Thermal-Wet Needless 7 483,097 236,520 na na $1,345,219 299
DIF Extra Baking HKE N 2 4 Thermal-Wet Needless 5 185,062 na na na $398,438 99
ETC AMAT Ar Treatment AMAT Ar 5 Burn-Wet Needless 3 na na 63,072 126,144 $1,970,369 241
242 285 20,037,780 4,432,572 63,072 126,144 $50,976,928 11,485

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