Page 31 - Vol.47

TSMC / FACILITY PUBLISHED
VOL.47
廠務季刊

URL.http://nfjournal/

單向流無塵室氣流組織改善及精進管理

Air Distribution Improvement and Management of Downflow Clean Room

文│葉濤 姜玉龍│上海廠務部│

摘要 / Abstract

不同於其他廠區無塵室內前期造價昂貴的天車系統(Automatic Material Handling System, AMHS)，F10廠區無塵室內採用的
是人工物料搬運系統(Manual Material Handling System, MMHS)，因此Open Cassette的特殊性應運而生。為保證暴露於無塵室
環境中產品的高良率，需要嚴格控制無塵室內的Particle數量與氣態分子污染物濃度(Airborne Molecular Contamination, AMC)，
因此廠區内操作區以高標準class1環境設計，確保無塵室内氣流組織能以「活塞流」形式迅速排出受污染的空氣。然而，隨著廠
區內裝機及產能需求的不斷變化，無塵室內已形成的氣流路徑也隨之而改變，這種改變對於垂直單向流無塵室氣流組織的調教
帶來了巨大的挑戰。本文首先引入現階段運用成熟的軟體工具-CFD數值模擬，接著通過文獻中數值模擬相關研究說明垂直單向
流潔淨室內氣流組織的影響因素，也間接證明數值模擬可為氣流組織優化方案提供良好的指導方向。最後，本文從「精確狙擊
EAOC」、「精確監控OMDS」及「精確圍獵三板斧」三個維度去介紹單向流無塵室氣流平行度改善及精進管理辦法。

關鍵詞 / 氣流組織、數值模擬、EAOC、OMDS、精進管理「三板斧」

Different from AMHS(Automatic Material Handling System) which is expensive in the early stage in other plant clean rooms,
the manual material handling system(MMHS) is used in F10 plant clean rooms. Therefore, the particularity of open cassettes
came into being. In order to ensure the high yield of products which exposed to the clean room environment, It is necessary
to strictly control the particle and gaseous molecular contaminant(AMC) in the clean room. Therefore, the F10 is designed
with a high standard class environment to ensure the airflow organization in the vertical unidirectional flow clean room and
quickly discharge the indoor polluted air in the form of "piston" flow. However, with the continuous change of the installation
and capacity demand in clean room, the formed airflow path in the clean room also changes, which poses a great challenge
to the adjustment of the airflow organization in the vertical unidirectional flow clean room. This paper first introduces the CFD
numerical simulation, a mature software tool used at this stage, and then explains the impact of the airflow organization in the
vertical unidirectional flow clean room through the numerical simulation research in the literature, which also indirectly prove
that numerical simulation can provide guidance for the optimization plan of air distribution. Finally, this paper introduces the
improvement of air parallelism and intensive management methods of unidirectional flow clean room from the three levels of
"Accurate Sniping EAOC", "Accurate Monitoring OMDS" and "Accurate Hunting Three Board Axe".

Keywords / Air Distribution, Numerical Simulation, EAOC, OMDS, Intensive Management "Three Board Axe"

1. 前言

1.1 什麼是氣流組織?單向流無塵室的氣流組織是何種? 污染物質及顆粒物，避免或減少渦流和死角，縮短滯留時間，
降低污染物與產品的接觸幾率。此外還要兼顧室內溫濕度均勻
半導體廠的氣流組織不同於一般空調房間，其首要的目
性，維持機台運行環境穩定。
的是供給足量的潔淨空氣，能快速地替換、稀釋室內所產生的

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