Page 43 - Vol.47
P. 43

TSMC / FACILITY PUBLISHED
                VOL.47
                                                         廠務季刊


                                                          URL.http://nfjournal/



                200mm廠區系統擴充面臨考驗與突破-以VOC/VEX系統擴充為例

                Challenges and breakthrough of 200mm Fab system expansion-example by VOC/
                VEX system expansion


                                                                                                 文│李振中│竹科廠務二部│


                摘要 / Abstract

                    三廠原始空污處理系統無設計備援機制，各區域僅要求維持負壓，後期為維持負壓，擴充時僅考慮管路串並聯混接，且
                AEX/VEX為法規加嚴後才進行擴充。為在不影響無塵室運作下擴充系統卻導致擴充後系統過於複雜，增加系統穩定運轉困難
                度。為逐步朝向「空污零排放」的目標邁進，規劃分3期進行三廠VOC處理系統擴充整併工程，並計畫於2021年歲修完成第1期
                擴充。由於建築物未設計廠務系統擴充空間，且新型處理設備重量遠大於設計載重。另一方面，VEX主風管是以GEX管路修改而
                來由管徑相對不足，且迴風道較小，無法設置大型風管取代。

                關鍵詞 / 揮發性有機物、沸石濃縮轉輪

                    The original air pollution treatment system of the FAB3 has no design backup function. Each area only requires the
                maintenance of negative pressure. In the later period, it is required to maintain negative pressure. When expanding, only the
                series and parallel connections of pipelines are considered, and AEX/VEX is expanded only after the regulations are tightened. In
                order to expand the system without affecting the operation of the clean room, the expanded system is too complicated, which
                increases the difficulty of stable operation of the system. In order to gradually move towards the goal of "zero emission of air
                pollution", it is planned to carry out the expansion and integration project of the VOC treatment system of the third plant in three
                phases, and it is planned to complete the first phase of expansion in 2021. Because the building does not design the expansion
                space of the plant service system, and the weight of the new processing equipment is much greater than the design load. On
                the other hand, the main air duct of VEX is modified from the GEX pipeline because the pipe diameter is relatively insufficient,
                and the return air duct is small, so it is impossible to install a large air duct to replace it.

                Keywords / Volatile Organic Compounds(VOCs), Zeolite Rotor Concentrator



                1.  前言

                    三廠原始空污處理系統無設計備援機制，且AEX/VEX皆為                   充空間，且結構載重能力相對不足，必須依設備重量補強建築
                法規加嚴後才進行擴充，後期擴充為維持負壓，僅使用管路串                        物結構。此外，三廠VEX皆為民國88年半導體空污排放標準公
                並聯混接，造成很多混排錯排的問題。統計後VEX錯排改正需                       布後，利用既有GEX管路修改而來，管徑因此受到限制，且回
                求將增加167,000CMH，遠大於目前既有VOC系統處理量。因                   風道空間相對狹小，無法設置大型風管取代，必須將原單一樹
                此規劃依改善進度分三階段進行VEX/VOC系統擴充，計畫於                      狀風管系統分流，並於歲修時轉供完成。VOC舊系統的Cold
                2021年歲修完成第1期擴充並投入運轉。為在不影響產線運轉                      standby備援模式須配合進行軟硬體修改，其中軟體面更為重
                的情況下及有限時間內完成歲修前投入運轉的準備工作，在擴                        要，並且無法在產線運轉的情況下進行測試。
                充規劃評估階段即發現諸多難題急待克服。                                    三廠預計分三階段逐年進行VEX/VOC系統擴充，Y2021為
                    首先，由於建築物設計時未考慮產線擴充時廠務系統擴                       第一階段擴充，如 圖1所示。本文將著重於本次系統擴充所遇


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