Page 118 - Vol.48
P. 118
Tech
Notes
Н
TSMC / FACILITY PUBLISHED
VOL.48
↗⨡
URL.http://nfjournal/
⊮ᳫ斴ⶠ垻廞ᳫ⺁士壆塍⅁⪤↗
(FR ,QGXVWULDO 3DUNV (,3 7KH 3ODQQLQJ 'HVLJQ DQG &KDOOHQJH IRU 7DLFKXQJ =HUR
:DVWH 0DQXIDFWXULQJ &HQWHU
㗘ɞ慾≂⁼ɞ⑁Ṿ⼱〉嚦ɞ
㌖堿 $EVWUDFW
⑁䪞杌䕳兎㍒仝㕅↖熂⼳㤕䊺䕳≋戠ỷ㮶㕑⎘熂⧓↽⑉(6*⢂⒛㊑㐾枃⨥⥧⼳㤕䊺于戠䖂 ⻅䵕 命⛉ ⻅熂剄 ⻅⹃
⣯旈剄 命⛉ ⻅䛕㲅㻧熂΅↽⑉䕳兎姠⋔桡ᾁ剄 ⻅⼳㤕䊺⨥⥧ⱘ欩悥 命⛉ ⻅ἶṛ˛䆇偝↹⑁⼳㤕䊺嚦䑗戠兎⏌䅲㴦桗≺
㮶㕅↖熂增䕰⼳㤕䊺嚦䑗崌䕹恡⻅ṛ⎘˚⥧愹㍘㩪'-6,㘶䜛ᾟ咎䮚■條熂䗇⼳㤕䊺䅲嚦⑀␌㝅ⱘ㉡䄋㝻ῗ㕅⼱䛕暌⋬熂㏹⌦咎ⰷ
˥⿻䔁䷤䀰˦ῗ暞ᾟ悜徚棹曻⹃㚀⊌ṞⰊ为熂✱㮵熂↽⑉⹃㘍 ⻅恫悟ⱙ㢙桡䯨熂ṷ㘍 ⻅㮴⽠▰⌦剙⽋˥⑁Ṿ杇⼳奎恱Ṿ
〔˦熂桡婙 ⻅㮴⽠䈰悜˛
杇⼳Ṿ〔䷭㗅❜↸⥧⿻䔁䷤䀰䛍Ⲧ巹⌳熂㈚䕹˥䕰㆜⍧⸶㦾⎑ (FR ,QGXVWULDO 3DUN ˦㧓う熂㘍䷤䀰枳悃墝Ῥ㈚搙␛兎崘㻡㗅
熂䔁⣔枳㹬Ɫ⥺䆇崘㻡㷙偨剘䔁⣔㲲㠤熂䦏㝔枳⊘⺇⌦⿻䔁䷤䀰䕳㦾㗅欥䛍Ⲧ˛ⱙ㢙㖙䜛⍖⑼ Ȋ⼳㤕䊺㹬戠熐㹬Ɫ⑁䪞Ṿ䨢⼱
⎑㰠⻅ 命⛉⼳㤕䊺戠熂䝉䗇㘍↹↽⑉⼳㤕䊺㹬戠 熂㝻ῗ匶㍒仝㕅Ⲧ䭊䨢␛⎨䨢杇⼳Ṿ〔熂桡ᾁ剄 ⻅⑀㹬Ɫ↹↽⑉ ⼳
㤕䊺戠熑ȋ䤄㏣㖏㹬戠熐㹬Ɫ兎崘㻡偨䕹˚㹬Ɫ⏰䊺㗪旜㏲戠␛乿䠾悜徉帮朳熂桡婙㰠⻅㹬䤄䵕 命⛉熂䵕䗇 ⥸⯚㤿㟨↽❣䛕
䤄⒉暕戠熑Ȍ棹曻㖊◕熐㰠⻅㹬Ɫ 命弛㭲ẜ❜悤 䝒悤ỵ恫悜徉˛
㝽㗘ⱘ≗Ỽ䛍Ⲧ剄䑏曟㰆ẜⱙ㢙儝㛀临䖂˚婾婙姠䖼䷤檨熂㚓嘚䖂㮵㭲㪰㝔⇞㭲㫳姧䝉昭↸Ⰺ␛OHVVRQ OHDUQ熂ἶ㝰兎ᾭ䄋
㝻ῗ⎑杇⼳奎恱Ṿ〔㍒仝㖊◕␛䴏悃䛕⡋䥟˛
旃捜婅 ䷱勃奎恱˚⿻䔁䷤䀰˚䕰㆜⍧⸶㦾⎑˚丫へ䷤䀰˚⼳㤕䊺䯲䑗˚崘㻡⇞䕰˚杇⼳奎恱Ṿ〔˚㑧䲔⊁㑧䲔˚(6*˚6'*V
760& FRPPLWV WR JUHHQ PDQXIDFWXULQJ DQG DGKHUHV WR WKH ZDVWH PDQDJHPHQW SULQFLSOH RI 0LQLPL]LQJ :DVWH DQG
0D[LPL]LQJ 6XVWDLQDEOH 8VH RI 5HVRXUFHV $V WKH &RPSDQ\ FRQWLQXHV H[SDQGLQJ LWV UHVHDUFK DQG GHYHORSPHQW LQYHVWPHQW
SUHYHQWLRQ RI UHODWHG HQYLURQPHQWDO LPSDFW DQG KLJK HIILFLHQW XVH RI UHVRXUFHV KDYH EHFRPH 760& V ORQJ WHUP JRDOV IRU
VXVWDLQDEOH GHYHORSPHQW
6LQFH WKH VHPLFRQGXFWRU PDQXIDFWXULQJ SURFHVV UHTXLUHV D ODUJH QXPEHU RI FKHPLFDOV UHGXFLQJ WKH FRQVXPSWLRQ RI
FKHPLFDOV DQG WXUQLQJ ZDVWH LQWR YDOXDEOH UHVRXUFHV LV D SUDFWLFDO DFWLRQ IRU 760& ,Q 760& VWDUWHG LQWURGXFLQJ LQ KRXVH
ZDVWH UHJHQHUDWLRQ IDFLOLWLHV WR FRQYHUW WKH ZDVWH LQFOXGLQJ XVHG DPPRQLXP VXOIDWH VXOIXULF DFLG FRSSHU VXOIDWH FREDOW VXOIDWH
DQG K\GURIOXRULF DFLG IURP LWV SURGXFWLRQ SURFHVVHV LQWR YDULRXV W\SHV RI UHF\FOHG SURGXFWV +RZHYHU WKH DPRXQW RI ZDVWH
EHLQJ RXWVRXUFHG IRU WUHDWPHQW NHHSV LQFUHDVLQJ IURP PHWULF WRQV LQ WR PHWULF WRQV LQ
7R RYHUFRPH WKH FKDOOHQJH 760& KDV SODQQHG WR EXLOG 7DL &KXQJ =HUR :DVWH 0DQXIDFWXULQJ 7&=:0 &HQWHU DV D VLJQLILFDQW
VWULGH WRZDUGV RXU YLVLRQ RI FLUFXODU HFRQRP\ 7KH 7&=:0 FHQWHU LV SURMHFWHG WR VWDUW WKH RSHUDWLRQV E\ WKH HQG RI \HDU WR
HOLPLQDWH SODQW ZDVWH DERXW WRQV \HDU DQG WR JHQHUDWH DERXW WRQV \HDU RI KLJK YDOXH SURGXFW 7KLV DUWLFOH LQWHQGV WR
JLYH UHDGHUV DQ RYHUYLHZ RI 7&=:0 &HQWHU LQFOXGLQJ EDFNJURXQG SODQQLQJ GHVLJQ DQG FKDOOHQJH RI WKH SURMHFW
Keywords *UHHQ 0DQXIDFWXULQJ &LUFXODU (FRQRP\ (FR ,QGXVWULDO 3DUN /LQHDU (FRQRP\ :DVWH 0DQDJHPHQW 5HVRXUFH
5HFRYHU\ =HUR :DVWH 0DQXIDFWXULQJ &HQWHU &UDGOH WR &UDGOH (6* 6'*V