Page 89 - Vol.48
P. 89

TSMC / FACILITY PUBLISHED
                  VOL.48
                                                          ⶞↗⨡⃈


                                                            URL.http://nfjournal/



                  垻䣉ⶠ㫲ᳫ䚫抆…㫝⇔⋆䄧≹攢䨔䐣僅士壆塍⅁

                  6\VWHP 'HVLJQ DQG 5HPRYDO 6WUDWHJ\ RI 3)$6 IURP 6HPLFRQGXFWRU :DVWHZDWHU




                                                                                               㗘ɞ啲⯘弣 ᾦ检≺ɞ㘁⼱婾婙愹ɞ


                  ㌖堿   $EVWUDFW

                      ⎛ⱟ欥䖝怢⻅䪞㧆旜䛍⸶㦾⇞䕰㲅㋑墤熂ⱘ刻廼㏣㖏䛕⸶㦾⼳㲅⇞奎Ῥ⊞㰆奎䩜戞㘁ῐ䕹熂⼳㲅ṾṞ㙤壼㲅嚦䑗䵌䷂␌暵䛕
                  䠾䤄搙↹㱰⍧⑙䊺熂朧䆇⑁䂴䜿⊞㝻㝚⊇婓㴦姠䯲⊇㏣㖏䀔⻷熂ᾗ⹃旜⨜壼戞姧㚀⑷⿂桐⇞䕰㲅㲅崻˛㝽䡥䫇㏳婟⥫㘊㗘䏌熂媦
                  惉⎛ⱟ欥⼱㝑悺嚦䑗㘊㴦熂ṷ戮ⱞ嫃㴦≗㟡㞡崻⸿䗁ⱞ㘍␌暵㉡㖙䛕⿂桐熂㝑⿝ⱟ↶㋑墤㘍ⰷ曬⸶⼱悜徚㹽媷˛
                      㶌へ䤄检䦋㘍應へ㚓㔒㝚㝑欩䛕↹㱰⍧⑙䊺␌暵䏘熂≗㟡Ṛ䩿Ṟ⑝⼱䊝㶌へ䤄䋊へ熂❹ⰷ檨⯵⑕桖㹽媷䛍䑏⏰㗪䄋䆪䆵䛕㶌
                  へ䤄␌暵㖙㟭⥸㘍㦁㰍䤄˛ⱘ梗䳣䆪䆵䤄㘍⸶⼱䭀⽋便恴仝⼳㲅悃㶒悟䁏⢥熂ṷ⑝㮶≗㟡⥫僲奎䩜⼳㲅熂ⱘ⑼㝚㮵梯䊺崻ẜ⼳㲅
                  憞便ⱙ䯲朗Ṿ䵞↶嚦䑗熂䶡㟭检䦋䵌䷂䭀␌暵䏘⑀旈㝰䪺⯫悥     ἶṛ熂⥫⼱⇞䑏へ檨定㖏㶒于␌暵䏘ỷ䛗悥     ἶṛ熂定ⰷ
                  㝽㘊㴦䄋䤋ⰷ㝚㖙ṥ⑀ⰷ曬〼恰ⱟ↶㈚䕹ẜ恥⿢˛

                  旃捜婅   ↹㱰⍧⑙䊺˚↹㱰Ṓ䅈䥋應˚㶌へ䤄˚⼳㲅嚦䑗

                      7KH VHPLFRQGXFWRU LQGXVWU\ KDV EHHQ GHYHORSLQJ LQGXVWULDO UHFODLPHG ZDWHU WHFKQRORJ\  ZKLFK UHF\FOHV WKH LQGXVWULDO
                  ZDVWHZDWHU GLVFKDUJHG E\ LWVHOI IRU UHXVH LQ WKH PDQXIDFWXULQJ SURFHVV  7KH VKRUW FKDLQ 3HUIOXRURDON\O 6XEVWDQFH 3)$6  LQ WKH
                  ZDVWHZDWHU DUH QRW HDVLO\ UHPRYHG E\ WKH ZDWHU WUHDWPHQW V\VWHP  WKH VWXG\ VXUYH\V WKH PRVW VXLWDEOH UHPRYDO PHWKRG IRU
                  IDFWRULHV  GLVFXVVHV WKH PDWHULDO GLIIHUHQFHV RQ WKH UHPRYDO UDWH  WKHQ ILQDOO\ LQWURGXFHG LQWR WKH IDFWRU\ RSHUDWLRQ
                      *UDQXODU $FWLYDWHG FDUERQ *$&  VKRZV WKH KLJKHVW 3)$6 UHPRYDO UDWH XQGHU DFLG FRQGLWLRQ LQ WKH VWXG\  &KDUDFWHULVWLFV RI
                  WKUHH GLIIHUHQW EUDQGV RI DFWLYDWHG FDUERQ DUH DQDO\]HG LQ ODERUDWRU\ WHVWV  ,W LV IRXQG WKDW WKH UHPRYDO UDWH RI ELWXPLQRXV FRDO LV
                  JUHDWHU WKDQ FRFRQXW FRDO  )LOWHUV ILOOHG ZLWK ELWXPLQRXV FRDO DUH LQVWDOOHG LQ WKH IDFWRULHV DQG VHUYHG ZLWK FRQWLQXRXV ZDVWHZDWHU
                  LQIORZ  :LWK ZDVWHZDWHU GUDLQV FRQWDLQLQJ ZLWK 3)$6 DUH LGHQWLILHG DQG SLSHG LQWR WKH V\VWHP  WKH UHVXOWV VKRZ WKDW WKH UHPRYDO
                  UDWH DW WKH V\VWHP HQG FDQ EH PRUH WKDQ       FRQVWDQWO\  $FFRUGLQJ WR WKH PXOWL SODQW UHSURGXFLELOLW\ YHULILFDWLRQ  WKH ILQDO
                  HIIOXHQW LPSURYHPHQW UDWHV DUH DOO PRUH WKDQ        ,W LV SURYHG WKDW WKH PHWKRG LV LQGHHG HIIHFWLYH DQG FDQ EH SUDFWLFDOO\
                  LQWURGXFHG LQWR WKH IDE RSHUDWLRQ

                  Keywords   3HUIOXRURDON\O 6XEVWDQFH 3)$6   3HUIOXRUR %XWDQH 6XOIRQLF $FLG 3)%6   $FWLYDWHG &DUERQ  :DVWHZDWHU 7UHDWPHQW



                      ℋ墾
                          ⻅㚀⑁䂴怢  ⻅ῗ㲅ㄖ㝑䄋✅ⵌ䛕ṑ⻅熂㲅ⱞ㘍㛇                    ⾈⍧䕹㲅㖙䏘熂ṷ旜⨜♨媷ⱘ⇞䕰㲅ⱟ↶⎛ⱟ欥奎䩜ῐ䕹熂
                  ❤奎恱㚀Ṟ⑀㉧例䛕熂㲅崘㻡䛕䛍Ⲧ⊌ṞⰊ为˛ṥ怢⻏⻅䔁                         ⹝㝬嘚䖂⇞䕰㲅䛕㋑墤旜䛍熂旈㝰⑀㉡䄋ṑ桖䪺⯫Ῥ㈚䛕㲅
                  ‮ㅠ宩欩㾃熂䛍Ⲧ⑀㝐ἴ刻ῗ㲅䛕㘁剙㲅㻡熂Ṟᾗ⑀ἶ⣯⋱                         㻡熂ṷ为娴⑁䂴㲅崘㻡✱⮴䰑≗憞Ṟ➘䛕■條熂暞ᾟ刻ῗ㲅
                  㲅㻡䪺⯫暞ᾟ㙂䃎⺇ῗ䛕℈Ⰴ熂惕⑀—悃㲅崘㻡⇞≺䕹ἶ㏶                         村㲓峱㔥熂悥⊁䪺⯫悜徚剘㲉仝䛍Ⲧ䛕䜿㩪˛
                  怢㲅崘㻡㮴㖙䜛䛕䜿㩪˛₫䄋↙檖偖熂⑁䂴⎛ⱟ欥㛇❤奎恱                            ⇞䕰㲅Ẍ姒ῗ㻡䄋㱢䕰㲲㲅剘⸶㦾⼳㲅䛕✯㖇⇞≺䕹熂
                  㦾偖䄋✱㈚㝻ῗ㱴寛惈剘ⰷ幡䷱勃奎恱熂⸶⼱䭀Ṟ№㍒仝                         䆇偝㱢䕰㲲㲅㲅崻㰥彔朴ἶ䪺⯫㏸⊇˛䄋ỗ兎⥱㉡⋰␧ἴ刻



                                                                                              FACILITY JOURNAL        12  2022
   84   85   86   87   88   89   90   91   92   93   94