Page 22 - Vol_51

廠務季刊 Facility Journal 2023

LSC DRE 檢測手法標準化及電漿式 LSC De-N O 和 NOx 之策略
2
Standardization of LSC DRE measurement method and strategy for De-N O
2
and NOx by Plasma-based LSC
文││田麒鈺 簡仲廷│新竹廠務五部

摘要

摘要 隨著日趨嚴謹之空污法規、新建廠之環評及公司 ESG 2050 年淨
零排放之目標，FAC 致力於發展各種污染物的減量技術。目前多
1. 前言
數的 CIT 案皆是在 LSC 進行，也因此為了確保這些 CIT 能有效
2. 文獻探討 對空污減量，LSC DRE 的檢測手法的準確性顯得相當重要，故需
對其訂定標準化手法。此外，本案也將此驗證手法應用於評估新
2.1 N 2 O & NOx 之使用
型 Plasma-Wet type LSC 測試其對溫室氣體 N 2 O 的去除效率，並
與對環境之危害
以 CH 4 作為還原劑進行 De-NOx CIT 改善。結果顯示，在純氣測
2.2 N 2 O 之處理 & NOx 之形成 試下當電壓電流為 48A/166V~57A/170V 時，對 N 2 O 的處理效率
2.3 De-NOx 方法簡介 為 90.2~91.7%，出口 NOx 濃度約 1000ppm。而在加入 CH 4 後，
N 2 O 之 DRE 可達 98.4~99.9%，NOx 濃度則降低至約 500ppm。
2.4 各 type LSC 對 N 2 O之
而在 process-run 時，NOx 濃度約為 100ppm。代表 CH 4 參與反
DRE 及副產物
應後可以有效的提高 N 2 O 的 DRE 及降低 NOx 的出口濃度。這項
3. 實驗方法 技術後續也被使用於電熱式 LSC，朝淨零目標更進一步。
3.1 LSC DRE 標準化之訂定 關鍵詞 : 一氧化二氮、氮氧化物、去除效率、電漿、一氧化二氮去除

3.2 Plasma-wet LSC 以 CH 4
With increasingly stringent air pollution regulations,
還原法 De-NOx 之應用
environmental impact assessments for new factory construction
sites, and the goal of achieving net-zero emissions by 2050,
4. 結果與分析
FAC is committed to developing various pollution reduction
4.1 CH 4 De-NOx 廠外測試結果 technologies. Currently, most CIT cases are carried out in LSC.
Therefore, to ensure that these CITs can effectively reduce air
4.2 CH 4 De-NOx 廠內測試結果
pollution, the accuracy and compliance of LSC DRE testing
及標準檢測手法應用
are crucial, and thus, standardized methodologies should
5. 結論 be established for LSC DRE testing. Furthermore, this study
also applied this verification method to evaluate the removal
參考文獻 efficiency of greenhouse gas, N 2 O, by a new type of plasma-wet
LSC during the testing period, and the De-NOx CIT using CH 4
作者介紹
as a reducing agent was also tested. The results showed that
under pure gas testing, when the voltage current was between
48A/166V and 57A/170V, the removal efficiency of N 2 O was
between 90.2% and 91.7%, and the outlet NOx concentration
was about 1000ppm. After adding CH 4 , the DRE of N 2 O could
reach 98.4% to 99.9%, and the NOx concentration was decreased
to 500ppm. Under the process-run conditions, the concentration
of NOx was about 100ppm. This indicates that CH 4 can effectively
enhance the DRE of N 2 O and reduce the outlet concentration
of NOx after participating in the reaction. This method was
subsequently applied to thermal-wet LSC, further advancing
towards the goal of net-zero emissions.
Keywords : N 2 O, NOX, DRE, Plasma-Wet LSC, De-NOx

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