Page 72 - Vol_51

廠務季刊 Facility Journal 2023

循環經濟_硫酸銨乾燥系統設立與空污防治技術
Establishment of ammonium sulfate drying system and air pollution
control technology
文││高舶格│台南廠務四部

摘要

摘要 隨著產能及研發規模持續擴充，台積公司採取「廢棄物產出最小
化，資源循環使用最大化」的廢棄物管理方針。其中，針對廢硫酸
1. 前言
及氨氮廢水，繼民國 104 年成功轉製為可委外再利用的硫酸銨廢
2. 文獻探討 液；台積公司再次領先業界、進一步導入「機械式蒸汽再壓縮(MVR)」
技術，並以晶圓十五 A 廠為起點，將硫酸銨廢液「點石成金」，
3. 實驗方法
轉製為有價的工業級硫酸銨結晶產品。硫酸銨乾燥系統 (ASC) 因其
3.1 硫酸銨乾燥系統運轉原理 為蒸氣含有高濃度硫酸銨，容易在管路內部形成結晶阻塞。在晶圓
與廢氣處理配置 十四 B 廠更一部精進，在原有空污處理設備中獨立出專門處理廢
棄物再生系統的空污設備，並新增現址式水洗洗滌塔進一步處理排
3.2 污染物來源分析
氣系統中的結晶物，分流處理除了移除對於本業的晶圓製造排氣系
3.3 風管流場影響
統的影響，更能提升硫酸銨乾燥系統的運轉效率。
4. 結果與分析 關鍵詞 : 機械式蒸氣再壓縮、洗滌塔、硫酸銨

4.1 空污檢測結果
With the continuous expansion of production capacity and
4.2 並聯系統影響分析
R&D scale, TSMC adopts the waste management policy
of �minimizing waste output and maximizing resource
5. 結論
recycling�. Among them, for waste sulfuric acid and ammonia
參考文獻 nitrogen wastewater, following the successful conversion of
waste sulfuric acid and ammonia nitrogen into ammonium
作者介紹
sulfate waste liquid that can be outsourced and reused in 104
; TSMC once again leads the industry and further introduces
�Mechanical Vapor Recompression(MVR)� technology,
and uses The Wafer 15 A factory is the starting point to
convert the ammonium sulfate waste liquid into valuable
industrial-grade ammonium sulfate crystal products.
Because the ammonium sulfate drying system contains high
concentration of ammonium sulfate, it is easy to form crystal
blockage inside the pipeline. The wafer 14 B plant has been
further improved, and the air pollution equipment dedicated
to the waste regeneration system has been separated from
the original air pollution treatment equipment, and a depth
filter has been added to further treat the crystals in the
exhaust gas. In addition to the impact on the industry�s
wafer manufacturing exhaust system, it can also improve the
operating efficiency of the ammonium sulfate drying system.

Keywords : Mechanical Vapor Recompression, Scrubber,
Ammonium Sulfate

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