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廠務季刊 Facility Journal 2023

先進封裝製程廢水零排評估與規劃
The Assessment of Zero Liquid Discharge in Advanced Packing Process
wastewater
文│林俊凱│先進封裝廠務一部

摘要

摘要 隨著半導體製程發展，製程用水日益增多，如何有效將機台排水
適當分流並利用水回收技術進行廢水回收成為廠務重要課題。近
1. 前言
年來水處理技術不斷發展，實廠應用 EDR/BWRO/蒸發罐/結晶罐
2. 文獻探討 等技術達成零排放目標，但近年全球公司注重 ESG 政策，須將各
環境面進行整體考量 ( 水回收、用電、廢棄物利用工業用水等 )。
2.1 零排放前處理技術
本文將介紹各技術實廠應用優缺、流程及操作成本等，並提出已
2.2 零排放分鹽回收
實現零排放實廠案例進行介紹，最後藉由台積先進封裝三廠為案
2.3 零排放熱處理技術 例，提出零排放評估需考量項目及規劃對環境衝擊較小的零排處
2.4 實廠案例介紹(龍潭友達) 理流程。
關鍵詞 : 廢水處理、零排放技術、零排放規劃
3. 實驗方法
3.1 水質分析方法 With the development of semiconductor manufacturing process,
3.2 薄膜評估軟體模式 Industrial water is increasing day by day. How to effectively
divert tool Wastewater drainage and use recycling technology to
3.3 熱處理技術軟體模式
recycle wastewater has become an important issue for Facility.
Recently, water treatment technology has continued to develop.
4. 結果與分析
The actual factory has applied technologies such as EDR/BWRO/
4.1 廢水水質特性分析 Evaporation tank/Crystallization tank to achieve the goal of zero
emissions. waste utilization, etc. However, Every Company have
4.2 零排系統Model評估結果
focused on ESG policy, and must consider all environmental
4.3 成本分析評估 aspects(like water recycling, electricity consumption,
waste reuse). This article will introduce the advantages
5. 結論
and disadvantages of the actual plant application of each
參考文獻 technology, such as the process flow and operating costs, etc.,
and introduce the case of the actual factory that has achieved
作者介紹 zero emission. Finally, Taking TSMC AP3 for example, the paper
proposes the items that is considered in the assessment of Zero
Liquid Discharge project and plans a appropriate treatment with
less impact on the environment.
Keywords : Wastewater Treatment, Zero Liquid Discharge
Tech Technology, Plan of Zero Liquid Discharge(ZLD)

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