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圖九、(a) 特定粒子濃度水平層流於水平表面的流速剖面
(b)Gaussian Diffusion Sphere 在水平層流中的運動軌跡 [8]

(a)
Real Flow Boundary Layer

Imaginary Velocity Pro le within
U Concentration Boundary Layer

u c,i
δ c,i

L i
Deposition Surface

(b)
Particle Position at t r,i = 0 Gaussian Di usion Sphere

δ s,i
u c,i
δ c,i
y ij
y R i
x
z L i

Deposition Surface

許多未知的疑問待解，需要持續不 [3] Christof Asbach, Heinz Fissan, Jung Kim, Jin-Won Lee, Removal of 10-nm
Hyeun Kim, Se-Jin Yook and David Y. con-taminant particles from Si wafers
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