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Tech
Notes
技術專文

文│陳錦村│廠務技術發展專案│

Signal Processing

Analysis
& Spectral

訊號處理及頻譜分析

The signal processing is the fundamental to deal with digital signal data, such as vibration or earthquake
signal. After processing the recorded data, further spectral analysis is needed to identify the features of the
signal, and use the feature to carry out such as system identification, vibration source diagnose. This paper
introduces the basic signal processing and spectral analysis, and some examples are presented.

Introduction damages from earthquake in recent years, and
there are several cases of vibration impacts
oth mechanical vibration and seismic on tool operation; that further emphasize
vibration are critical to Fab’s operation, the importance of the knowledge on signal
Bthus it is very important to measure processing and spectral analysis. The signal
and analyze both vibrations. TSMC suffers processing knowledge is the basis to understand

圖片來源 http://www.electronicproducts.com/RF_and_Microwave_Components/
RF_and_Microwave/Applications_in_RF_Microwave.aspx
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