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300mm FABS

        FACILITY JOURNAL






                                                                   JUNE / 2018
                                                                    L.30
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                                                                    O



         TSMC / 300mm FD PUBLISHED                              URL.http://nfjournal/









            下一個世代的


            空污防治與節能挑戰



            半導體業揮發性有機物高效率尾氣處理系統的設計挑戰與創新
            The Challenge of Semiconductor VOCs Exhaust Treatment System & Innovation of High Removal E ciency

            正負2℃―冰水系統最佳化控制創新方法
            Innovative Method of Optimization Energy Saving Control for Positive
            and Negative 2°C - Chilled Water System
            高效濾網於機台排氣粒狀物減量之應用
            Tool Exhaust HEPA Retro t in Particulate Matter Reduction










































                                                                                                          Fabs Facility Division
                                                                               300mm FABS FACILITY JOURNAL          JUNE  2018  1
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