Page 5 - Vol.30

Tech Notes

技/術/專/文

半導體業揮發性有機物高效率尾氣處理系統的設計挑戰與創新
The Challenge of Semiconductor VOCs Exhaust Treatment System &
Innovation of High Removal Efficiency

正負 2℃─冰水系統最佳化控制創新方法
Innovative Method of Optimization Energy Saving Control for Positive and
Negative 2°C - Chilled Water System

罩泡塔應用於立式洗滌塔處理效率改善研究與探討
The Study for Enhancement in the Removal Efficiency of Central Scrubber

談異丙醇化學濾網使用效率提升之研究
Research on IPA Chemical Filter Efficiency Improvement

高溫脫附法應用於沸石轉輪處理效率改善之探討與驗證
The Application of High-temperature Desorption for Honeycomb Zeolite
Concentrator Treatment System in Semiconductor Fab Facility Systems

製程廢氣處理設備阻塞改善與保養頻率有效減量
Local Scrubber Clogging Improvement and PM Frequency Reduction

燃燒水洗式洗滌塔操作參數與副產物探討
The By-product and Parameter of Burning Type Local Scrubber

水力薄膜應用於洗滌塔中無機酸鹼去除效率之探討
Application of Demister in Removal Performance Enhancement of Inorganic
Acid and Base in Scrubber

高效濾網於機台排氣粒狀物減量之應用
Tool Exhaust HEPA Retrofit in Particulate Matter Reduction

中科十五廠三/四期揮發性有機物處理設備 攝影/曾俞勳 影像處理/洪湘寧