Page 30 - Vol.35

Tech
Notes
技術專文

總懸浮微粒酸鹼鹽類濃度 參考文獻 Environment international, 1997. 23(4):
圖10、Removal efficiency in different particle size of in/outlet p. 489-496.
[1] Hinds., W.C., Aerosol Technology Pro- [18] EPA, U.S., National Ambient Air Quality
總懸浮微粒以離子層析儀分析其酸
perties, Behavior, and Measurement Standards for Particulate Matter; Final
鹼鹽類濃度，於深層式濾網箱入、 of Airborne Particles William C. Hinds. Rule. 1997a, Federal Register. p.
100% Wiley, New York (1999). ISBN 0-471- 38651-38760.
2-
+
出口皆以NH 4 以及SO 4 為主要離 19410-7. 464 pages+Index. Journal of [19] EPA, U.S., National Ambient Air Quality
子濃度，共佔總濃度之83.6%，如 Aerosol Science, 1982. 31(9). Standards for Particulate Matter; Final
表3所示，由數據可推測管道中懸浮 80% [2] Whitby, K.T.a.B.C., Fine Particles., in In Rule. 1997b, Federal Register. p.
International Conference on Environ- 38761-38762.
微粒主要成分為硫酸銨鹽，且其處 mental Sensing and Assessment. 1976, [20] 陳春萬、杜宗明，口罩對大小不同灰塵
Institute of Electrical and Electronic 的效果測試，in 專題報導，2016，勞工
理效率皆大於7成。 60% Engineers: Las Vegas. 安全衛生展示館
Efficiency (%) [3] Salvi, S. and S.T. Holgate, Mechanisms [21] Hinds, W.C., Aerosol technology:
of particulate matter toxicity. Clin Exp
properties, behavior, and measurement
Allergy, 1999. 29(9): p. 1187-94.
酸鹼性氣體濃度分析 40% [4] Adgate, J.L ., et al., Longitudinal of airborne particles, 2nd Edition. 1999:
John Wiley & Sons.
variability in outdoor, indoor, and [22] Lee, K. and B. Liu, Theoretical study
以多孔金屬片採樣，收集深層式濾 personal PM2.5 exposure in healthy of aerosol filtration by fibrous filters.
non-smoking adults. Atmospheric Aerosol Science and Technology, 1982.
網箱入、出口之各項氣體濃度，再 20% Environment, 2003. 37(7): p. 993-1002. 1(2): p. 147-161.
以離子層析儀分析其濃度，參見 表 Efficiency [5] Buonanno, G., et al., Chemical, dimen- [23] Chuanfang, Y., Aerosol filtration appli-
sional and morphological ultrafine cation using fibrous media-an industrial
4，入出口皆以NH 3(g) 為主要酸鹼性
0% particle characterization from a waste- perspective. Chinese Journal of Che-
氣體，入口端達783ppmv，經深層 <0.1 0.1-0.4 0.4-1.0 1.0-2.5 2.5-10 10-18.0 to-energy plant. Waste Management, mical Engineering, 2012. 20(1): p. 1-9.
式濾網處理其效率達49.2%，其餘 Particle size range ( m) 2011. 31(11): p. 2253-2262. [24] Barhate, R.S. and S. Ramakrishna,
[6] Ragazzi, M., et al., Management of Nanofibrous filtering media: filtration
氣體濃度等級接近於ppbv，可能落 atmospheric pollutants from waste problems and solutions from tiny
incineration processes: the case of materials. Journal of membrane
於採樣誤差範圍內，其處理效率與 Bozen. Waste Manag Res, 2013. 31(3): science, 2007. 296(1-2): p. 1-8.
濃度數值僅供參考。 表 3、Ion concentrations of total suspended particulate of filter housing in/outlet p. 235-40.
[7] Miller, F.J., et al., Size Considerations
for Establishing a Standard for
3
Filter inlet (μg/m ) 3 Filter outlet (μg/m ) Efficiency (%) Inhalable Particles. Journal of the Air
Pollution Control Association, 1979.
29(6): p. 610-615.
[8] Delfino, R.J., C. Sioutas, and S. Malik,
結論 NH 4 85940.1 21882.7 74.5% Potential role of ultrafine particles in
+
F - 12.2 8.0 34.4% associations between airborne particle
mass and cardiovascular health.
Cl - 5.3 2.6 50.9% Environ Health Perspect, 2005. 113(8):
p. 934-46.
酸槽機台所使用之高溫硫酸液滴
- 20.0 10.2 49.0% [9] Utell, M.J. and M.W. Frampton, Acute
與氨氣化合成原生微粒，依 圖1 NO 2 health effects of ambient air pollution:
Whitby and Cantrell之研究，氣相 NO 3 - 113.1 54.2 52.1% the ultrafine particle hypothesis. J
Aerosol Med, 2000. 13(4): p. 355-59.
化學物質勻相成核之粒徑應落於 2 - 245989.7 65182.1 73.5% [10] Schwartz, J., D.W. Dockery, and L.M.
SO 4
Neas, Is Daily Mortality Associated
0.01-0.1微米，當微粒行經富含水
TSP 396886.0 124560.0 68.6% Specifically with Fine Particles? J Air
氣之水渦流機時，與水氣接觸並凝 Waste Manag Assoc, 1996. 46(10): p.
927-939.
結，將發展成0.1-1微米之懸浮微
[11] Wilson, W.E . and H.H. Suh, Fine
粒，此機制與本研究入口端的94% particles and coarse particles: concen-
表 4、Concentrations of acidic and alkali gas of filter housing in/outlet tration relationships relevant to epide-
之PM0.1-1.0具高度相關性。 miologic studies. J Air Waste Manag
Assoc, 1997. 47(12): p. 1238-49.
深層式濾網使用特殊編織法創造多 Filter inlet (ppbv) Filter outlet (ppbv) Efficiency (%) [12] Geiser, M. and W.G. Kreyling, Depo-
孔過濾材質，將微粒補集於整個濾 sition and biokinetics of inhaled nano-
particles. Part Fibre Toxicol, 2010. 7: p.
材中，而不僅只攔截於表層，故在 NH 3 783 398 49.2% 2.
阻塞前可承載更多微粒，帶來低壓 [13] Schäffler, A. and N. Menche, Mensch,
HF 50 44 11.9% Körpe r, Krank he it: Anatom ie ,
損及生命周期較長等優點。本研 Physiologie, Krankheitsbilder. 1999:
HCl 24 11 53.6%
究以IC分析總懸浮微粒主要組成即 Urban & Fischer Verlag.
[14] ICRP, Human respiratory tract model
為硫酸根離子及銨根離子，佔總懸 HNO 2 113 22 80.2% for radiological protection. A report
浮微粒質量的83.6%。硫酸銨鹽為 59 18 69.5% of a Task Group of the International
HNO 3 C ommission on Radiological
高水溶性鹽類(74.4g/100g H 2 O, Protection, in Ann ICRP. 1994. p. 1-482.
H 2 SO 4 3.1 2.8 11.4%
20℃)，處理過程中持續對濾網灑 [15] Kreyling, W. and M. Geiser, Dosimetry
of Inhaled Nanoparticles. 2009. p. 145-
水，除可溶解微粒達濾網再生外， 171.
以灑水來模擬 圖1 的降雨洗淨過程 [16] 工業污染防治技術服務團編著，半導體
製造業污染防治技術，1995，臺北市：
(Rainout and washout)，將空氣中 水霧滴大小、水量、角度等進行改 知，藉由調整濾網纖維密度、濾材 經濟部工業局
的懸浮微粒去除，最後達67%之總 善，將可在既有框架中進一步提升 厚度、纖維直徑，可在壓損與去除 [17] Tsai, C.-J., C.-C. Miao, and H.-C. Lu,
White smoke emission from a semi-
去除效率。由此可預期，若針對灑 其去除效率，並透過公式(1)可得 效率上找到更佳的平衡點。 conductor manufacturing plant.

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