Page 31 - Vol.35
P. 31

Tech
 Notes
 技術專文

 總懸浮微粒酸鹼鹽類濃度  參考文獻                                Environment international, 1997. 23(4):
 圖10、Removal efficiency in different particle size of in/outlet  p. 489-496.
              [1]  Hinds., W.C., Aerosol Technology Pro-  [18] EPA, U.S., National Ambient Air Quality
 總懸浮微粒以離子層析儀分析其酸
                 perties, Behavior, and Measurement   Standards for Particulate Matter; Final
 鹼鹽類濃度,於深層式濾網箱入、  of Airborne Particles William C. Hinds.   Rule. 1997a, Federal Register. p.
 100%            Wiley, New York (1999). ISBN 0-471-  38651-38760.
 2-
 +
 出口皆以NH 4 以及SO 4 為主要離  19410-7. 464 pages+Index. Journal of   [19] EPA, U.S., National Ambient Air Quality
 子濃度,共佔總濃度之83.6%,如   Aerosol Science, 1982. 31(9).  Standards for Particulate Matter; Final
 表3所示,由數據可推測管道中懸浮  80%  [2]  Whitby, K.T.a.B.C., Fine Particles., in In   Rule. 1997b, Federal Register. p.
                 International Conference  on  Environ-  38761-38762.
 微粒主要成分為硫酸銨鹽,且其處  mental Sensing and Assessment. 1976,   [20] 陳春萬、杜宗明,口罩對大小不同灰塵
                 Institute of Electrical and Electronic   的效果測試,in 專題報導,2016,勞工
 理效率皆大於7成。  60%  Engineers: Las Vegas.            安全衛生展示館
 Efficiency (%)  [3]  Salvi, S. and S.T. Holgate, Mechanisms   [21] Hinds, W.C., Aerosol technology:
                 of particulate matter toxicity. Clin Exp
                                                  properties, behavior, and measurement
                 Allergy, 1999. 29(9): p. 1187-94.
 酸鹼性氣體濃度分析  40%  [4]  Adgate,  J.L ., et  al.,  Longitudinal   of airborne particles, 2nd Edition. 1999:
                                                  John Wiley & Sons.
                 variability in outdoor, indoor, and   [22] Lee, K. and B. Liu, Theoretical study
 以多孔金屬片採樣,收集深層式濾  personal PM2.5 exposure in healthy   of aerosol filtration by fibrous filters.
                 non-smoking adults. Atmospheric   Aerosol Science and Technology, 1982.
 網箱入、出口之各項氣體濃度,再  20%  Environment, 2003. 37(7): p. 993-1002.  1(2): p. 147-161.
 以離子層析儀分析其濃度,參見 表  Efficiency  [5]  Buonanno, G., et al., Chemical, dimen-  [23] Chuanfang, Y., Aerosol filtration appli-
                 sional and morphological ultrafine   cation using fibrous media-an industrial
 4,入出口皆以NH 3(g) 為主要酸鹼性
 0%              particle characterization from a waste-  perspective. Chinese Journal of Che-
 氣體,入口端達783ppmv,經深層  <0.1  0.1-0.4  0.4-1.0  1.0-2.5  2.5-10  10-18.0  to-energy plant. Waste Management,   mical Engineering, 2012. 20(1): p. 1-9.
 式濾網處理其效率達49.2%,其餘  Particle size range ( m)  2011. 31(11): p. 2253-2262.  [24] Barhate, R.S. and S. Ramakrishna,
              [6]  Ragazzi, M., et al., Management of   Nanofibrous filtering media: filtration
 氣體濃度等級接近於ppbv,可能落  atmospheric pollutants from waste   problems and solutions from tiny
                 incineration processes: the case of   materials. Journal of membrane
 於採樣誤差範圍內,其處理效率與  Bozen. Waste Manag Res, 2013. 31(3):   science, 2007. 296(1-2): p. 1-8.
 濃度數值僅供參考。  表 3、Ion concentrations of total suspended particulate of filter housing in/outlet  p. 235-40.
              [7]  Miller, F.J., et al., Size Considerations
                 for Establishing a Standard for
    Filter inlet (μg/m ) 3  Filter outlet (μg/m ) 3  Efficiency (%)  Inhalable Particles. Journal of the Air
                 Pollution Control Association, 1979.
                 29(6): p. 610-615.
              [8]  Delfino, R.J., C. Sioutas, and S. Malik,
 +
 結論  NH 4  85940.1  21882.7  74.5%  Potential role of ultrafine particles in
 F -  12.2  8.0  34.4%  associations between airborne particle
                 mass  and cardiovascular health.
 Cl -  5.3  2.6  50.9%  Environ Health Perspect, 2005. 113(8):
                 p. 934-46.
 酸槽機台所使用之高溫硫酸液滴
 -  20.0  10.2  49.0%  [9]  Utell, M.J. and M.W. Frampton, Acute
 與氨氣化合成原生微粒,依   圖1   NO 2  health effects of ambient air pollution:
 Whitby  and  Cantrell之研究,氣相  NO 3 -  113.1  54.2  52.1%  the ultrafine particle hypothesis. J
                 Aerosol Med, 2000. 13(4): p. 355-59.
 化學物質勻相成核之粒徑應落於  2 -  245989.7  65182.1  73.5%  [10] Schwartz, J., D.W. Dockery, and L.M.
 SO 4
                 Neas, Is Daily Mortality Associated
 0.01-0.1微米,當微粒行經富含水
 TSP  396886.0  124560.0  68.6%  Specifically with Fine Particles? J Air
 氣之水渦流機時,與水氣接觸並凝  Waste Manag Assoc, 1996. 46(10): p.
                 927-939.
 結,將發展成0.1-1微米之懸浮微
              [11] Wilson, W.E . and H.H. Suh, Fine
 粒,此機制與本研究入口端的94%  particles and coarse particles: concen-
 表 4、Concentrations of acidic and alkali gas of filter housing in/outlet  tration relationships relevant to epide-
 之PM0.1-1.0具高度相關性。  miologic studies. J Air Waste Manag
                 Assoc, 1997. 47(12): p. 1238-49.
 深層式濾網使用特殊編織法創造多     Filter inlet (ppbv)  Filter outlet (ppbv)  Efficiency (%)  [12] Geiser, M. and W.G. Kreyling, Depo-
 孔過濾材質,將微粒補集於整個濾  sition and biokinetics of inhaled nano-
                 particles. Part Fibre Toxicol, 2010. 7: p.
 材中,而不僅只攔截於表層,故在  NH 3  783  398  49.2%  2.
 阻塞前可承載更多微粒,帶來低壓  [13] Schäffler, A. and N. Menche, Mensch,
 HF  50  44  11.9%  Körpe r, Krank he it: Anatom ie ,
 損及生命周期較長等優點。本研  Physiologie, Krankheitsbilder. 1999:
 HCl  24  11  53.6%
 究以IC分析總懸浮微粒主要組成即  Urban & Fischer Verlag.
              [14] ICRP, Human respiratory tract model
 為硫酸根離子及銨根離子,佔總懸  HNO 2  113  22  80.2%  for radiological protection. A report
 浮微粒質量的83.6%。硫酸銨鹽為  59  18  69.5%  of a Task Group of the International
 HNO 3           C ommission on Radiological
 高水溶性鹽類(74.4g/100g  H 2 O,   Protection, in Ann ICRP. 1994. p. 1-482.
 H 2 SO 4  3.1  2.8  11.4%
 20℃),處理過程中持續對濾網灑  [15] Kreyling, W. and M. Geiser, Dosimetry
                 of Inhaled Nanoparticles. 2009. p. 145-
 水,除可溶解微粒達濾網再生外,  171.
 以灑水來模擬 圖1  的降雨洗淨過程  [16] 工業污染防治技術服務團編著,半導體
                 製造業污染防治技術,1995,臺北市:
 (Rainout and washout),將空氣中  水霧滴大小、水量、角度等進行改  知,藉由調整濾網纖維密度、濾材  經濟部工業局
 的懸浮微粒去除,最後達67%之總  善,將可在既有框架中進一步提升  厚度、纖維直徑,可在壓損與去除  [17] Tsai, C.-J., C.-C. Miao, and H.-C. Lu,
                 White smoke emission from a semi-
 去除效率。由此可預期,若針對灑  其去除效率,並透過公式(1)可得  效率上找到更佳的平衡點。  conductor manufacturing plant.



 30                                                                                 FACILITY JOURNAL          SEPTEMBER   2019  31
   26   27   28   29   30   31   32   33   34   35   36