Page 32 - Vol.44
P. 32

Tech
                                                                                                    Notes
                                                                                                    技術專文


                                                  TSMC / FACILITY PUBLISHED
           VOL.44
                                                   廠務季刊


                                                     URL.http://nfjournal/



           實現綠色製造-增進生物系統處理效率達到放流COD減量

           Decreasing COD concentration of effluent by increasing efficiency of Bio-System




                                                                                           文│林佑勳│台中廠務四部│


           摘要 / Abstract

              隨著半導體製程的精進，晶圓製程用於防倒線及除水痕異丙醇(IPA)的使用量逐漸上升，N7世代IPA使用量已為N16世代之6
           倍，在已可觸及的N2世代，IPA用量更可達N16之16倍。對於放流水中化學需氧量濃度，如何能低於科管局納管標準(<500ppm)
           成為一大課題，2018年新工處在F15B(N10)開始導入生物處理系統以活性污泥法加上活性污泥膜濾法(MBR)處理有機廢水。
              因製程的複雜度及避免空污影響到無塵室的AMC，製程廢水混排大幅提升生物系統處理的難度，本文就比較各廠的系統
           設計及操作之間差異，及F15B面臨生物系統設計進流水COD碳負荷超過設計量，NH 3 -N去除率不佳的問題，來探討如何在試
           俥階段維持高去除率與運轉後的參數調整，以F15P7運轉實務經驗可將生物系統有效及快速的試俥，同時維持穩定的去除率
           (>97%)，並對於鼓風機細部分析以此提供給未來新廠系統規劃及試俥的參考。

           關鍵詞 / 異丙醇、化學需氧量、生物系統、活性污泥法、活性污泥膜濾法

              With the improvement of the semiconductor manufacturing process, the demand for isopropyl alcohol (IPA) to
           remove watermarks from the wafer surface has gradually increased. The use of IPA in N7 technology is six times larger
           than that in N16 technology. Moreover, the use of IPA in N2 technology may reach 16 times larger than that in the N16
           manufacturing process. The increasing demand for IPA leads to the increasing COD levels in effluents. How to contain
           the COD levels below 500 ppm, the emission standard of the Bureau of Science and Technology, has become the main
           issue. In 2018, the NFDD developed an activated sludge process and membrane bioreactor system (MBR) in Fab 15B to
           treat organic wastewater.
              Due to the complexity of the advanced manufacturing process, the wastewater from different process streams
           significantly increases the difficulty of biological system treatment. We discuss the problems that Fab 15B faced such
           as the COD levels of inflow exceeding the system design and the insufficient NH3-N removal rate. We compare the
           differences between the system design and operations of each plant to determine the optimal operating parameters
           during the commissioning phase and operation stage. With the practical experience of Fab 15B, we provide an effective
           and rapid commissioning strategy while maintaining a stable removal rate (>97%). We also analyze the blower in detail
           that can be the design reference for future new fabs.

           Keywords / Isopropyl Alcohol(IPA), Chemical Oxygen Demand, Bio-System, Activated Sludge Process, Membrane Bio-
           Reactor(MBR)



           1.  前言

              晶圓製造中為了確保晶圓潔淨度，大量使用濕式清潔                        化學品、超純水(稀釋，沖洗)和電子級有機溶劑，其中為了
           來確保沒有矽晶體缺陷和雜質，而濕式清潔主要使用電子級                        將晶圓表面的水份去除，製程使用高純度(>99.9%)的異丙醇

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