Page 16 - Vol.45

Tech
Notes
技術專文

TSMC / FACILITY PUBLISHED
VOL.45
廠務季刊

URL.http://nfjournal/

空污防制設備轉動元件振動品質精進

Improved vibration quality of rotating components of air abatement equipment

文│陳聰│新竹廠務三部│

摘要 / Abstract

在生產製程中產生的污染廢氣，會使用到離心式風機來處理廢氣排放。目前廠區多半的風機都是用外國經過電腦模擬計算
設計的工法，以高處理效率及降低成本的目的來製作風機．所以風機整體結構強度在一般氣體使用上應無問題，但若是使用酸
鹼氣體，為避免酸鹼氣體造成葉輪金屬表面腐蝕，葉輪表面都會包覆一層天然橡膠，然而橡膠表面易附著結晶物，致使葉輪在
經過一段時間的運轉後，風機葉輪易附著一些結晶物，經長時間累積而造成葉輪上的動平衡破壞，如果不處理，最後將導致風
機轉動元件損壞及結構破壞問題。因此結晶物造成的葉輪動平衡不良問題，必然會造成頻繁的停機來處理結晶物，如此對於生
產製程及維修人力造成很大的負荷。所以透過分析及計算後發現現在風機結構的支撐強度及耐震性較差，容易造成只要葉輪有
結晶物附著，風機就會以肉眼看得出有非常的大的振動，驗證經由結構補強後，可以降低風機因結晶物累積造成不穩定振動，
避免造成轉動元件損壞，也讓其持久穏定的運作。

關鍵詞 / 轉動元件、振動、動平衡

Polluting waste gas generated during production process will be exhausted by using centrifugal fans. Currently, most of
the fans in factory are manufactured by foreign countries through computer simulation design methods, with the purpose of
high efficiency and cost reduction. Even structural strength of fan is no problem for general gas using. But if for acid-base gas
using, as the surface of the impeller will be coated with a layer of natural rubber in order to avoid corrosion to impeller metal
surface, the rubber surface is easy to adhere to crystals. After a period of operation time, crystals adhered will cause the dynamic
balance of impeller to be damaged. If this condition is not corrected, it will most likely cause damage to the rotating components
and structure of the fan. Therefore, poor dynamic balance of the impeller caused by the crystals will inevitably cause frequent
shutdowns of the fan to process crystals, which causes a increasing load on the production process and maintenance manpower.
As long as the impeller has crystals attached, the fan will generate big vibration. After analysis and calculations, it is found that
the support and structure of fan are poor, if the structure is reinforced, unstable and big vibration caused by accumulation of
crystals can be reduced, which prevents damage to rotating components and allows it to operate stably and lastingly.

Keywords / Rotating Component, Vibration, Dynamic Balance

1. 前言

以未來智慧AI廠務系統為藍圖進行本主題之破題，因半導 而風機的維護以元件為主，例如基礎避振器、軸承、軸心等
體製造已儼然成為兵家必爭之地，廠務系統是維繫整廠正常運 等，一旦突發故障輕則維護成本及人力負荷增加，較嚴重甚至
作最重要的部門，台積電是世界級公司必須針對廠務系統維護 影響公司整體形象、工安、環保議題、晶圓生產損失(這部分
策略進行精進來確保設備良率量化基準，本次主題以空污防制 需要量化)及設備搶修成本，因此需重新思考如何建構一套以
設備為主軸，它是位於頂樓室外的各類有毒化學廢氣排風機， 標準資產架構為基礎，評估廢氣風機各部位元件的良率及相關

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