Page 48 - Vol.45
P. 48

Tech
                                                                                                    Notes
                                                                                                    技術專文


                                                  TSMC / FACILITY PUBLISHED
           VOL.45
                                                   廠務季刊


                                                     URL.http://nfjournal/



           LSC切閥風險管理及智能化應用

           LSC Switching valve Risk Management and Intelligent Application




                                                                                       文│林欣駿 林俊億│台中廠務三部│


           摘要 / Abstract

              隨著台積製程演進與空污改善需求的增加，工廠內的廢氣處理設備(Local Scrubber, LSC)切閥次數也更加頻繁，其各廠區LSC
           切閥異常的案件及影響機台生產的品質也不斷的攀升。為了避免各廠區人員切閥異常造成的損失，我們透過Si-view系統與EPT機
           台運作模式(Equipment Performance Tracing)之系統整合，快速運算出LSC切閥的黃金時段，除了提升人員查詢機台資訊的即時
           性及便利性，也可避免人員溝通上的誤差及大幅降低切閥異常的風險。目前已完成F15B Furnace LSC智能查詢系統，未來持續推
           廣至各300MM廠區使用。

           關鍵詞 / 廠務管理、資訊整合、智能化應用

              With the evolution of TSMC process and the increasing demand for air pollution improvement, The waste gas treatment
           equipment(Local Scrubber, LSC) in the factory also cuts more frequently, The cases of abnormal LSC valve cutting in various
           factories and the quality of machine production are also rising. In order to avoid the loss caused by abnormal valve cutting by
           personnel in each plant area, We integrate the system with the EPT machine operation mode(Equipment Performance Tracing)
           through the Si-view system, Quickly calculate the prime time of LSC valve cutting, In addition to improving the real-time and
           convenience of personnel inquiring machine information, It can also avoid errors in personnel communication and greatly
           reduce the risk of abnormal valve cutting. F15B Furnace LSC intelligent query system has been completed, In the future, it will
           continue to be promoted to all 300MM factories.

           Keywords / Facility Management, Information Integration, Intelligent Application



           1.  前言

              近年來PM2.5和空氣污染的問題，一直是民眾關心的重大                    一整合系統開發，讓此關鍵動作在特定的安全時間內執行，則
           議題。特別是中南部的冬天降雨天數較少時，空污的問題就更                       可避免影響產品生產時間與產品的良率。
           讓人有感。為此公司不斷在生產機台後段增設廢氣處理設備
           LSC(圖1)，此設備雖連接著生產機台但廠內分工精細，其廢氣
           處理設備的維修與保養一直以來都在廠務部門執行，隨著台積
           製程演進與空污改善需求，LSC廢氣處理設備數量不斷的在增
           加，工廠與廠務在維修保養上的溝通配合也越來越繁重，但往
           往因人員溝通不良或操作錯誤，導致幾千萬的產品就此報廢。
              長期以來此空污設備的維護，一直存在著影響生產的風
           險，尤其在Furnace LSC，一個異常的切換動作若發生在不對
           的時間上，小則影響產品良率，大則報廢產品。因此若能透過                                      圖1、機台生產流程圖

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