Page 105 - Vol_51
P. 105
TSMC/ Facility Published
圖 7：LSC 進出口量測
表 4：LSC DRE 測試
Compounds 量測點位 測值 圖譜
Average 10.4
Inlet (ppb) Max 27.4
L.D.L 0.001
Average ND
AsH 3
Outlet (ppb) Max ND
L.D.L 0.001
DRE (%) Average >99.9%
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