Page 14 - Vol_51

廠務季刊 Facility Journal 2023

成廠區有限空間的空污防治設備建置對策
Plan the construction of air pollution prevention equipment in the limited
space of the factory area
文││曾柏凱│新竹廠務二部

摘要

摘要 隨著環保意識抬頭及空污法規的演進，台積電呼應前
述，提出 ESG 2050 年淨零排放目標，老舊成廠區在空
1. 前言
污排放系統架構上有著難以改善的硬傷，除了防治設備
2. 文獻探討 老舊及備源機制不完全造成停機保養困難，更是有不同
種類排氣風管串接混排的設計。雖然空污排放仍符合現
3. 執行方法
行法規規範，以 F3 做為老舊成廠區代表來進行探討，
3.1 策略藍圖擬定 依照煙道排放狀況進行下游機台排放普查，釐清混錯排
及風管運轉量現況，同步驗證空污防治設備去除校率及
3.2 建立污染物質量平衡圖
運轉參數設定。歸納出五點主軸，機台內部混氣、風管
3.2.1 錯排管路分流 錯接、源頭高濃度排放、處理系統 Capacity 不足、處
理設備設計老舊校率不佳。特別是處理系統 Capacity
3.2.2 錯排管路改管
不足一項，為同時維持工廠運作前提下進行空污改善帶
3.3 全面翻新專案 - 設置 LWS 處理設備 來極大瓶頸。
3.3.1 全面翻新專案 - 關鍵詞 : 風管錯接、混排、Local Wet Scrubber、
VOC 系統整併與擴充汰換 去除效率、老舊成廠區、Capacity、蜂巢式填充材
3.3.2 處理設備效能提升 -
With the rise of environmental awareness and the
Central Scrubber By Pass 改善 evolution of air pollution regulations, TSMC has
responded by proposing its ESG net-zero emissions
4. 結果與分析
target for 2050. Older factory areas face hard-to-
5. 結論 improve flaws in their air pollution control systems,
caused by outdated equipment and incomplete
參考文獻 backup mechanisms leading to difficulties in
maintenance, as well as mixed exhaust duct designs.
作者介紹
Although the air pollution emissions still comply with
current regulations, using F3 as an example of an old
factory area, an inventory of downstream machine
emissions was conducted based on flue gas emission
conditions, clarifying the current situation of mixed
exhaust and duct operation, while simultaneously
verifying the removal efficiency and operating
parameters of air pollution control equipment. Five
main issues were identified: mixed gases inside
the machines, incorrect duct connections, high
concentration emissions at the source, insufficient
processing system capacity, and poor removal
efficiency due to outdated design. In particular,
the insufficient processing system capacity poses a
major bottleneck for air pollution improvement while
maintaining factory operations.

Keywords : Wrong connection of Exhaust、Exhaust
mixed exclusion、Local Wet Scrubber、DRE、Old
Facility area、Capacity、Honeycombs

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