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廠務季刊 Facility Journal 2023

新世代的廢硫酸回收處理系統開發
New Waste Sulfuric Acid Recycle System Development

文│吳世霖│綠色製造部

摘要

摘要 目前台積電各廠皆以鹽酸法去除廢硫酸中的雙氧水後回用
於氨氮廢水處理等系統，本文針對既有鹽酸法所衍生之含
1. 前言
氯物質(氯氣、氯離子)之腐蝕、殘留等問題作一探討和研
2. 文獻探討 究後，提出新的處理技術 - 硝酸法，並透過實驗室以及模
廠兩種不同等級之測試驗證，證明硝酸法不僅可以將雙
2.1 鹽酸在廢硫酸中之反應機制探討
氧水去除，且無副產物殘留問題，可完全解決鹽酸法之宿
2.2 應用雙氧水之催化劑種類探討
疾。目前 FRC Committee 已決議改造中科 F15P5 廠區
2.3 硝酸在廢硫酸中之反應機制探討 之既有廢硫酸處理系統(WSR) 以進行驗證，未來有機會納
2.4 硝酸、鹽酸對於不銹鋼之 入於新廠設計以取代既有鹽酸法，成為新世代的廢硫酸回
收處理系統(WSR2.0 版 )。
損害機制研究
關鍵詞 : 硝酸法、WSR、廢硫酸、催化劑
3. 研究方法
3.1 硝酸法之可行性研究 Currently, tsmc use hydrochloric acid to remove
hydrogen peroxide from waste sulfuric acid recycling.
3.2 模廠測試驗證
This article explores and studies the existing problems
4. 結果與分析 of hydrochloric acid method, such as equipment
corrosion from chlorine gas, residual chloride ions
4.1 硝酸法之可行性驗證結果
in the recycled sulfuric acid, and operational issues.
4.2 模廠測試結果討論 A new treatment technology, nitric acid method, is
proposed, and through laboratory and pilot tests, it
4.3 實廠設備規劃
is proven that nitric acid method can not only remove
hydrogen peroxide but also completely solve the
5. 結論
residual by-products in the recovered sulfuric acid,
參考文獻 and can eliminate the problems of hydrochloric acid
method. The FRC Committee has decided to conduct
作者介紹
a Pi -Run in the F15P5 site. In the future, it will replace
the existing hydrochloric acid method and become
the new generation of waste sulfuric acid recycling
treatment system(WSR2.0).
Keywords : Nitric Acid Method, WSR, Waste Sulfuric Acid,
Catalyst

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