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廠務季刊 Facility Journal 2023

地下氫氣應用於半導體產業之挑戰
Challenges of Underground Hydrogen in the Semiconductor Industry

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文│謝宗成 游昇哲 │ 台南廠務七部 廠務

摘要

摘要 氫氣地下管之應用為未來半導體產業之趨勢，為了能夠提升工廠運
轉穩定度，除了參考中油地下管設計及高雄氣爆案例，另外委託第
1. 前言
三方社團法人進行地下管完整性評估並執行相關削減措施。為了提
2. 文獻探討 升工廠品質，制定氫氣不純物濃度標準及工廠關鍵製程少量評估辦
法，建立地下管氫氣品質管理。氫氣地下管應用可以減少氣體槽車
2.1 中油管路防蝕設計
的更換次數也等同於減少柴油耗量，讓台積電達到節能減碳之目
2.2 中油管路防挖斷設計 的，善盡社會之責任。
2.3 高雄氣爆緊急關斷設計
關鍵詞 : 半導體、氫氣、地下管
3. 實驗方法
The application of hydrogen underground pipes is the future
3.1 地下環管路品質驗證 trend of the semiconductor industry. In order to improve the
stability of factory operation, in addition to referring to the
3.2 地下環管供氣品質驗證
design of CNPC�s underground pipes and the Kaohsiung gas
explosion case, a third-party is also entrusted to conduct
4. 結果與分析
integrity assessments of underground pipes and implement
4.1 正逆吹去除管路 relevant reduction. In order to improve the quality of the
不純物效果 factory, the standards for the concentration of hydrogen
impurities and the evaluation method for a small number of
4.2 單一Fab關鍵製程評估
key machines in the factory have been formulated, and the
供應測試 quality management of hydrogen in underground pipes has
been established. The application of underground hydrogen
5. 結論
pipes can reduce the number of replacements of gas trailers,
參考文獻 which is equivalent to reducing diesel consumption, allowing
TSMC to achieve the goal of energy saving and carbon
作者介紹 reduction, and to fulfill its social responsibility.
Keywords : Semiconductor, Hydrogen, Underground Pipes

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