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廠務季刊 Facility Journal 2023

老廠翻新_突破現有桎梏創造綠色及安全工作環境
The renovation in the old factory aims to break through existing limitations and
create a green and safe working environment

文│林紘億 李宜憲 謝承恩│新竹廠務一部

摘要

摘要 隨著半導體製程不斷進步，工廠持續關注環保與職業安
全，致力實現綠色製造和降低現場作業環境風險。F8 廠
1. 前言
區藉由黃光製程提升後原物料變更的契機，改良顯影劑
2. 文獻探討 供應方式，以 2.38%TMAH 槽車取代 25%TMAH 混酸系
2.1 25%TMAH高風險化學品接觸 統供應，停止高風險換酸作業，促成更安全的工作環境。
危害案例 因為 TMAH 供應系統分析模式的變化進一步降低 TMAH
排放。並且隨著 4G 網路普及，積極導入電子表單及
2.2 氣體洩漏危害案例及防範
iPad 作業，並可連結現場氣櫃操作，降低作業風險。電
2.3 電子化表單契機 子化表單可提高作業效率，減少紙張使用，完成了綠色
製造的目標。
3. 實驗方法
關鍵詞 : 顯影劑、表單電子化、雲端數據
3.1 25%TMAH混酸系統與2.38%
TMAH槽車供應系統架構比較
As semiconductor processes continue to advance,
3.2 顯影劑供應系統不同架構中找出 factories are actively focusing on environmental
減廢契機 protection and occupational safety, striving to
achieve green manufacturing and reduce on-
3.3 開發智能系統電子表單
site operational environmental risks. In F8 plant
3.4 電子表單雲端抓取數值應用 area, opportunities arising from changes in raw
materials post-enhancement using photolithography
4.結果與分析
processes have led to improvements in the supply of
4.1 顯影劑由25%TMAH混酸系統改為 photoresists. The 2.38% TMAH tanker has replaced
the 25% TMAH mixed acid system to eliminate high-
2.38%TMAH槽車供應達成減廢
risk acid exchange operations, thereby fostering
4.2 智能系統電子表單達成氣體洩漏
a safer work environment. Furthermore, changes
防範成效 in the analysis mode of the TMAH supply system
have further reduced TMAH emissions. With the
5.結論
widespread adoption of 4G networks, the active
implementation of electronic forms and iPad
參考文獻
operations, which can be linked to on-site fume
作者介紹 hood operations, helps reduce operational risks. The
digitization of forms enhances operational efficiency,
reduces paper usage, and achieves the goal of green
manufacturing.

Keywords : Developer, Electronic Form, Cloud Data

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