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廠務季刊 Facility Journal 2023

先進封裝廠零排放技術鑰徑_磷酸廢水資源化
The key challenges of advanced packaging process in Zhunan_Recovery for
phosphoric acid wastewater
文│李明遠 洪新雅│新竹廠務九部

摘要

摘要 含磷酸之化學藥劑被大量應用於先進封裝製程，而針對此含磷廢水做
的化混加藥處理所產生的高導廢水及大量鹽類廢棄物將為未來邁向零
1. 前言
排的最重要挑戰之一，故本篇研究藉由電透析法及薄膜法純化磷酸後
2. 文獻探討 再利用熱蒸發法使磷酸達再利用濃度，而分離之銅則電解成銅棒。電
透析初步試驗能成功純化分離此含磷廢水，根據實驗結果顯示電透析
2.1 磷化學
膜在操作參數，膜對數為 5unit、極室液為 0.3M、掃流速度 7cm/s、
2.2 處理技術 電流密度 30mA/cm 下效能較佳；而具有廣泛商業應用之 NF 藉由模
2
2.3 熱蒸發提濃 擬經兩段 NF+RO 後亦能有效分離磷酸及銅。純化後之 10% 磷酸以熱
泵搭配蒸發釜的方式提濃至 60% 最具節能效益，經效益評估後為電
3. 研究方法 透析搭配熱蒸發法在成本方面較具有效益，故後續將透過此初步結果
持續優化電透析模組及進行 pilot run 試驗，最終希望使其能成功應
3.1 電透析純化磷酸廢水
用於先進封裝廠上進行磷酸回收，以達到生物與環境零衝擊的零排放
之處理效能試驗
目標。
3.2 熱蒸發法提濃試驗
關鍵詞 : 磷酸廢水、電透析、磷酸回收、零排放
4. 結果與分析
Chemicals which contain phosphoric acid are widely used in
4.1 電透析法純化含磷廢水
advanced packaging processes. The general treatment technology
之試驗結果
of this wastewater is use chemical coagulation, but it could generate
4.2 各操作參數對電透析法 large amount of salt sludge and cause increase the conductivity in
效能之影響 effluent. This issue always is one of the most important challenges
for zero discharge in the future. This study is using electrodialysis
4.3 以NF/RO純化含磷廢水 or membrane to separate phosphoric acid with other pollution,
之模擬試驗結果 and then using thermal evaporation to increase the concentration
of phosphoric acid to reach 60%, and the other composition copper
4.4 以熱法濃縮含磷廢液之
also be separated and then electrolyzed into copper rods. The
試驗結果 preliminary experiment of electrodialysis successfully purify and
separate the phosphate wastewater. According to the experimental
4.5 系統設計流程及
results, the operating parameters of the electrodialysis membrane
效益評估
is 5units, the electrode chamber fluid is 0.3M, the sweep flow rate
2
5. 結論 is 7cm/s, and the current density is 30mA/m are recommended
an optimal condition for operation. The nano-filter, which has
參考文獻 wide commercial application, can also effectively separate
phosphoric acid and copper by two stages of NF and RO. The
作者介紹
10% phosphoric acid is concentrated to 60% by heat pump and
evaporator, which is the most energy-saving benefit. After the
evaluation, combine electrodialysis with thermal evaporation is
more cost-effective method than NF with thermal evaporation.
For the basis of related study, we will continue to optimize
the electrodialysis module and go the pilot run test. Finally it
will be successfully applied to advanced packaging plants for
phosphoric acid wastewater issue, so as to achieve the zero-
discharge goal of zero impact on biology and the environment.
Keywords : Phosphoric Acid Wastewater, Electrodialysis,
Phosphoric Acid Reuse, Zero-Discharge

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