Page 17 - Vol.43

P. 17

表5、PM TCP Form
Check
Asset Type Check List Check List Check List Check List Check List Check List Check List Check List Check List Check List
Section 系統子系統設備類型說明 (New) (周保) List (月保) (雙月保) (季保) (半年保) (年保) (2年保) (3年保) (5年保) (無週期) OI No.
(雙周保)
WT PLUMBING SUMP 6S-AREA NA NA NA NA NA NA NA NA NA NA NA NA
GC GAS BGS Booster空氣壓縮機-Atlas NA NA NA NA NA FCGS0403004-22FCGS0403004-22-01 NA NA NA NA F-CGS-04-03-004
IE HP GIS CB lifter NA NA NA NA NA NA NA NA NA NA NA NA
IE LV AUXILIARY TOOL CB lifter NA NA NA NA NA NA NA NA NA NA NA NA
GC GAS BGS CDA_ICA System CDA_ICA System年度NA NA NA NA NA NA FCGS0403004-24 NA NA NA NA F-CGS-04-03-004
GC GAS BGS CDA_ICA System Delair 無熱式乾燥機NA NA NA NA NA NA FCGS0403004-26 NA NA NA NA F-CGS-04-03-004
FCGS0403004-
GC GAS BGS CDA空氣壓縮機-Atlas 空壓機內層濾網 NA NA NA NA NA FCGS0403004-12FCGS0403004-12-02 NA NA NA 38/FCGS040300 F-CGS-04-03-004
4-37
GC GAS BGS CDA儲存槽 NA NA NA NA NA NA FCGS0403004-33 NA NA NA NA F-CGS-04-03-004
GC CHEMICAL CMTU CDS-KANTO 168 NA NA FCCH0103012-32/NA NA FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012 /
GC CHEMICAL CMDU CDS-KANTO CONC FCCH0103026 NA FCCH0103012-32/NA FCCH0103012-16 FCCH0103012-12FCCH0103012-31/FC NA NA NA FCCH0103012-18 F-CCH-01-03-012 /
GC CHEMICAL CMDU CDS-KANTO COND FCCH0103026 NA FCCH0103012-32 NA FCCH0103012-16 FCCH0103012-12FCCH0103012-31/FC NA NA NA FCCH0103012-18 F-CCH-01-03-012 /
GC CHEMICAL CMU CDS-KANTO KOH NA NA FCCH0103012-32 NA NA FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL CCB CDS-KANTO Non-Solvent NA NA FCCH0103012-32 NA NA FCCH0103012-12FCCH0103012-31 NA NA NA NA F-CCH-01-03-012
GC CHEMICAL CCBTU CDS-KANTO Non-Solvent NA NA FCCH0103012-32 NA NA FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL CTU CDS-KANTO Non-Solvent NA NA FCCH0103012-32 NA NA FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL LOCAL CDS-KANTO Non-Solvent NA NA FCCH0103012-32 NA FCCH0103012-16 FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL RECYCLE MODULE CDS-KANTO Non-Solvent NA NA FCCH0103012-32 NA NA FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL CDU CDS-KANTO Non-Solvent / DT NA NA FCCH0103012-32 NA FCCH0103012-16 FCCH0103012-12FCCH0103012-31/FC NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL CDU CDS-KANTO Non-Solvent /PresNA NA FCCH0103012-32 NA FCCH0103012-16 FCCH0103012-12FCCH0103012-31/FC NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL CCB CDS-KANTO Solvent NA NA FCCH0103012-32 NA NA FCCH0103012-12FCCH0103012-31 NA NA NA NA F-CCH-01-03-012
GC CHEMICAL CCBTU CDS-KANTO Solvent NA NA FCCH0103012-32 NA NA FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL CTU CDS-KANTO Solvent NA NA FCCH0103012-32 NA NA FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL LOCAL CDS-KANTO Solvent NA NA FCCH0103012-32 NA FCCH0103012-16 FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL RECYCLE MODULE CDS-KANTO Solvent NA NA FCCH0103012-32 NA NA FCCH0103012-12FCCH0103012-31 NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL CDU CDS-KANTO Solvent / DT NA NA FCCH0103012-32 NA FCCH0103012-16 FCCH0103012-12FCCH0103012-31/FC NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL CDU CDS-KANTO Solvent / Pres NA NA FCCH0103012-32 NA FCCH0103012-16 FCCH0103012-12FCCH0103012-31/FC NA NA NA FCCH0103012-18 F-CCH-01-03-012
GC CHEMICAL SUMP PIT PUMP CDS-Waste sump pump NA NA FCCH0103012-14 NA NA NA NA NA NA NA NA F-CCH-01-03-012
GC W-CHEM SUMP PIT PUMP CDS-Waste sump pump 待P123 check 設備類NA NA FCCH0103012-14 NA NA NA NA NA NA NA NA F-CCH-03-03-001
GC W-CHEM WCB CDS-Waste sump pump 待P123 check 設備類NA NA FCCH0103012-14 NA NA NA NA NA NA NA NA F-CCH-03-03-001
ME CR FFU Cleanroom-FFU with AMC Filter NA NA NA NA NA NA NA NA NA NA NA F-CHV-01-03-014
GC GAS BGS CO2純化器-SAES NA NA NA NA NA NA FCGS0103007-25 NA NA NA NA F-CGS-01-03-007
AEC TCPG roup Table ATC/Fcharter/iEDA/ICCI/DIP
(InSQL) TCP Group Chart
InSQLN ame TagName
Chart Name
Section Spec.
Phase
… 20
Tag
Zombie chart
Control Rule
Resolution
TCP
Table
Chart Rule F-charter Rule
Rule ATC Function
圖7、SPC chart模組化流程圖
AEC TCP Check List Mapping Table PM
(Asset) TCPG roup PM

Asset Name

Section Check List No.
Phase
… 32
PM OI
TCP
Table
Check List/ /
Asset Type
Rule PM
Mapping
Table PM
Check List Desc Check List Desc

圖8、PM模組化流程圖

FACILITY JOURNAL 09 2021 15

12 13 14 15 16 17 18 19 20 21 22