Page 62 - Vol.43

Tech
Notes
技術專文

material supply at least by 30% by cycling the regenerated raw 3.2 Project Scope
material back to TSMC.
In order to echo the promotion of the circular economy,
Secondly a Zero Waste Manufacturing campus will be built
the first zero-waste manufacturing center will be set up
that conforms to TSMC's integrity and corporate value image.
by TSMC and its suppliers in Environmental Facilities Land
Lastly the ZWM plants shall meet the highest standards in
Reservation (EFLR) 2-I and 2-II (Huan-Er or 環二) inside
safety & environmental aspects, and maximize waste reduction
CTSP(Central Taiwan Science Park). The project includes
and energy saving design, and further promote it as a global
six(6) zero waste manufacturing(ZWM) plants and one
zero-waste demonstration base. Safety shall be complied
Central Utility Plant(CUP). The six ZWM plants are Sulfuric
with Taiwan and international construction, fire protection and
Acid Regeneration Plant(SARP), IPA Regeneration Plant(IRP),
transportation regulations such as IBC, IFC, NFPA, GHS and
Ammonia Regeneration Plant(ARP), Solvent Thermal
etc.. Air pollution emission and water pollution discharge shall
Recovery Plant(STRP), Fluoride Recycling Plant(FRP), and Silica
achieve zero environmental impact, and zero waste landfilled.
Recycling Plant(SRP). The SARP, IRP, and ARP(together with
The target is to regenerate waste resources, about 12,000
TSMC in-house Ammonium Sulfate Unit) are truly circular
tons per month ; this will reduce the total waste in F15 Fabs by
economy examples-turning plant waste into valuable raw
60%. The overall carbon emissions can be reduced by at least
material. The six ZWM plants can eliminate plant waste about
40% due to the innovated energy-saving design and reduced
140,000 tons/yr and generate about 45,000 tons/yr of high-
demands in waste material shipping.
value product. The more details are described in the Table 1.
In addition, there are several technical objectives for
TCZWM project. They are : 3.3 Project Milestones
① The state of art of ZWM plants : All electronic grade The whole project will last about 3 years from year 2021
material such as NH 3 , IPA, and H 2 SO 4 meet the highest to year 2023 to build TCZWM center as shown in Figure 1.
TMSC standards ; impurities are controlled at ppt level or Below are a few highlights for the project milestones :
below.
① CUP construction will take about one year including
② The (industrial grade) Fluoride and Silica Recycling Plants
equipment installation starting from July 15 2021. The
adapt the best design of TSMC dust and pollution control
utilities will be ready by August 15 2022.
facilities.
② STRP scope is turn-key EPC package. The EPC
③ The Solvent Thermal Recovery Plant(STRP) provides
contract is pre-awarded on June 16 2021. Thus the
highest industrial quality of steam supplied to ZWM
EPC contractor started to apply construction permit
plants.
on behalf of TSMC. The construction is targeted to
④ The state-of-the-art central utilities facilities also meet the
start on September 28 2021. The commissioning will
highest standards in the below categories :
take about 2 months starting from Jan 15 2013. The
• Environmental-TSMC level air pollution/water full operation is debuted on March 15 2013.
pollution treatment and noise control meet the ③ Since five ZWM plants adapt BOO(business own
third-class control zone(<65dB) specifications. operate) model thus the contract has been pre-
• Quality-TSMC-level utilities supply : stable supply awarded to the selected suppliers for ARP, FRP, IRP,
pressure, and high-purity quality that meet TSMC and SRP on June 16 2021. The award selection of
requirements. SARP has been delayed since some of commercial
• Energy Saving-IE4 or higher motor type, natural terms are still discussing.
lighting, LED lighting, magnetic levitation ice water ④ The land rental contract of Huan-Er has been signed
host, optimized solar panel settings. with TSMC on June 21 2021. However each supplier is
• Green building-EEWH green building mark above obligate to apply its own admission permit with CTSP
the silver level. so the supplier can rent the land and apply for its
• Automation and intelligence-application in own construction permits later. The target completion
warehousing, inspection, lighting, traffic control. of the land rental contract for ARP, FRP, IRP, and SRP

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