Page 64 - Vol.43
P. 64
Tech
Notes
技術專文
F15A
F15B
Figure 2、The TCZWM Site Location Figure 5、The front view of TCZWM campus from Keya Seven Road
Figure 3、The TCZWM Mater Plan Figure 6、The projected interconnecting pipe racks
4. The Design of Six ZWM Plants
4.1 IPA Regeneration Plant(IRP)
4.1.1 Plant Scope
IRP will process about 27,600 tons/yr of IPA waste feed
and generate about 2,520 tons/yr of electronic grade of
IPA product back to TSMC for raw material use. The Table 2
demonstrates the typical concentration and impurities of waste
IPA feed.
Figure 4、The top view of TCZWM campus
Table 2、The Typical Concentrations and Impurities of Waste IPA Feed.
62
