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Figure 10、Process Flow Diagram of Liquified NH 3 Purification

Figure 11、Preliminary Layout of Ammonia Regeneration Plant

4.2.4 Project Milestone 4.3 Sulfuric Acid Regeneration Plant(SARP)
As shown in Figure 12, the supplier will take about 4 4.3.1 Plant Scope
months to apply CTSP member in order to rent the land and
SARP will process about 62,400 tons/yr of waste H 2 SO 4
apply construction permits. The construction will start around
feed and generate about 27,000 tons/yr of electronic grade of
12/M in 2021 and take about 12 months to complete including
H 2 SO 4 product back to TSMC for raw material use. The waste
equipment installation. The commissioning will start from
H 2 SO 4 feed is typically 45% to 60% in weight. The Table 4
March 2023 and the operation permits may take about 5
demonstrates the typical impurities of waste H 2 SO 4 feed.
months. Thus the normal operation is debuted on 4/E in 2023.

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