Page 66 - Vol.43

Tech
Notes
技術專文

Figure 8、Preliminary Layout of IPA Regeneration Plant

Figure 9、Project Milestones of IRP Scope

4.2 Ammonia Regeneration Plant (ARP) and then NH 3 is compressed and liquified under about 8 bar
pressure. The trace of water is removed from the series of
4.2.1 Plant Scope
purification columns and make the final liquified NH 3 product
ARP will process about 3,600 tons/yr of dry purified ASC
to meet the 6N5 TSMC grade.
(>99 wt.%) and generate about 840 tons/yr of electronic grade
4.2.3 Plant Layout
of liquified NH 3 product back to TSMC for raw material use.
As shown in Figure 11 below, the ASC will be shipped in
4.2.2 Process Introduction
bags from F15A or F15B, and stored it to ASC storage area.
As shown in Figure 10, ASC will be dissolved with DI water
Then ASC is taken to Process area for stripping and purification.
to 30% ammonium sulfate solution and the solution is mixed
The final liquified NH 3 product will be filled in cylinders in
with 45% caustic(NaOH) solution in order to extract NH 3 from
product filling area and sent back to F15A or F15B for use.
the solution in Hi-Gee Rotating Packed Bed under the vacuum
The side product Na 2 SO 4 is dried after Hi-Gee Rotating
conditions. Then it removes water through de-water column
Packed Bed and packed in bags in Na 2 SO 4 process area.

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